{"id":18,"date":"2013-09-09T11:39:38","date_gmt":"2013-09-09T15:39:38","guid":{"rendered":"http:\/\/csr-dyn-45\/~ralf\/wordpress\/?page_id=18"},"modified":"2014-03-10T11:21:31","modified_gmt":"2014-03-10T15:21:31","slug":"facilities","status":"publish","type":"page","link":"http:\/\/snl.mit.edu\/?page_id=18","title":{"rendered":"Facilities"},"content":{"rendered":"
\n

The Space Nanotechnology Laboratory<\/i><\/b> (SNL) includes 1930 sq-ft of laboratory space comprised of 1430 sq-ft Class 100 and 500 sq-ft support.<\/p>\n<\/div>\n

SNL Equipment Includes:<\/i><\/b><\/p>\n

\u25cf Interference Lithography System, Scanning Beam (SBIL) (MIT-built system)<\/i> Nanoruler<\/a>
\n\u25cf Interference Lithography System (IL) (MIT-built system)<\/i>
\n\u25cf Deep Reactive Ion Etcher SPTS Pegasus<\/em>
\n\u25cf Reactive Ion Etcher Plasma Therm Model 770<\/em>
\n\u25cf Scanning Electron Microscope AMRAY 3300 FEM<\/i><\/b>
\n\u25cf Vacuum Coater Denton Vacuum Desk II<\/i><\/b>
\n\u25cf Spin Coater\/Dryer SCS Model P6204\u2011A<\/i>
\n\u25cf Critical Point Dryer (NSL) Tousimis Autosamdri-815B<\/em>
\n\u25cf Coat-Bake System Brewer Science Cee 200 CBX<\/i><\/b>
\n\u25cf Full Wafer Imaging System (RIE) LES Model 1000-IS<\/em>
\n\u25cf Gold Fountain-Bath Pulse-Plater Marks and Associates<\/em>
\n\u25cf Gold\/Nickel Fountain-Bath Pulse-Plater (MIT-built system)<\/i>
\n\u25cf Three-Axis Adhesive Dispense System CAMELOT Model 1414<\/em>
\n\u25cf Bonding Aligner (MIT-built system)<\/i>
\n\u25cf Flat Glass Slumping Facility (MIT-built system)<\/i><\/b>
\n\u25cf Furnace NEY Vulcan 3-550<\/em>
\n\u25cf Furnace Lindberg\/Blue BF51542 COMC-1<\/em>
\n\u25cf Optical Surface Test, Shack-Hartmann (MIT-built system)<\/i>
\n\u25cf Thin Optic Assembly Truss (MIT-built system)<\/i>
\n\u25cf Thin Optic Kinematic Holder (MIT-built system)<\/i>
\n\u25cf Laminar Flow Chemical Hoods (2)
\n\u25cf Optical Microscopes (2) Leitz Ergolux, Wild M3Z<\/em>
\n\u25cf Autocollimator Newport LAE500<\/i><\/b>
\n\u25cf Surface Profilometer Dektak III<\/em>
\n\u25cf Analytical Microbalance Denver<\/i> Instruments Model A-200DS <\/i>
\n\u25cf Signal Analyzer HP 35670A<\/em>
\n\u25cf Spectrum Analyzer HP 8594E<\/i>
\n\u25cf Custom Vacuum Bonder ABBESS Instruments<\/i>
\n\u25cf Ultrasonic Cleaner VWR Aquasonic 250 D<\/i>
\n\u25cf Ultrasonic Cleaner CREST Tru-sweep 275-D<\/i><\/p>\n","protected":false},"excerpt":{"rendered":"

The Space Nanotechnology Laboratory (SNL) includes 1930 sq-ft of laboratory space comprised of 1430 sq-ft Class 100 and 500 sq-ft support. SNL Equipment Includes: \u25cf Interference Lithography System, Scanning Beam (SBIL) (MIT-built system) Nanoruler \u25cf Interference Lithography System (IL) (MIT-built system) \u25cf Deep Reactive Ion Etcher SPTS Pegasus \u25cf Reactive\u2026 Continue reading<\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"parent":4,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"ngg_post_thumbnail":0},"_links":{"self":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/18"}],"collection":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=18"}],"version-history":[{"count":12,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/18\/revisions"}],"predecessor-version":[{"id":710,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/18\/revisions\/710"}],"up":[{"embeddable":true,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/4"}],"wp:attachment":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=18"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}