{"id":63,"date":"2013-09-09T16:00:06","date_gmt":"2013-09-09T20:00:06","guid":{"rendered":"http:\/\/csr-dyn-45\/~ralf\/wordpress\/?page_id=63"},"modified":"2013-10-31T12:20:53","modified_gmt":"2013-10-31T16:20:53","slug":"the-mit-nanoruler-a-scanning-beam-interference-lithography-sbil-tool","status":"publish","type":"page","link":"http:\/\/snl.mit.edu\/?page_id=63","title":{"rendered":"The MIT Nanoruler\/Scanning Beam Interference Lithography"},"content":{"rendered":"

A Brief History of Gratings and the Making of the MIT Nanoruler<\/a> (pdf)<\/h3>\n

 <\/p>\n

\"A<\/a>

A 300 mm wafer patterend with a 400 nm-period grating on the Nanoruler air bearing stage.<\/p><\/div>\n

Related publications:<\/strong><\/p>\n

Optimization and Temperature Mapping of an Ultra-High Thermal Stability Environmental Enclosure<\/a> \"pdficon_small\"<\/a>
\nY. Zhao, D. L. Trumper, R. K. Heilmann, and M. L. Schattenburg
\nPrecision Engineering 34<\/b>, 164-170 (2010).<\/p>\n

Spatial-Frequency Multiplication with Multilevel Interference Lithography<\/a> \"pdficon_small\"<\/a>
\nC.-H. Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 26<\/b>, 2135-2138 (2008).<\/p>\n

Fabrication of 50 nm-Period Gratings with Multilevel Interference Lithography<\/a> \"pdficon_small\"<\/a>
\nC.-H. Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg
\nOpt. Lett. 33<\/b>, 1572 (2008).<\/p>\n

Phase Control in Multiexposure Spatial Frequency Multiplication<\/a> \"pdficon_small\"<\/a>
\nY. Zhao, C.-H. Chang, R. K. Heilmann, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 25<\/b>, 2439 (2007).<\/p>\n

Doppler Writing and Linewidth Control for Scanning Beam Interference Lithography<\/a> \"pdficon_small\"<\/a>
\nJ. C. Montoya, C.-H. Chang, R. K. Heilmann, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 23<\/b>, 2640 (2005).<\/p>\n

Dimensional Metrology for Nanometer-Scale Science and Engineering: Towards Sub-Nanometer Accurate Encoders<\/a> (Invited) \"pdficon_small\"<\/a>
\nR. K. Heilmann, C. G. Chen, P. T. Konkola, and M. L. Schattenburg
\nNanotechnology 15<\/b>, S504 (2004).<\/p>\n

Nanometer-Level Repeatable Metrology Using the Nanoruler<\/a> \"pdficon_small\"<\/a>
\nP. T. Konkola, C. G. Chen, R. K. Heilmann, C. Joo, J. C. Montoya, C.-H. Chang, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 21<\/b>, 3097 (2003).<\/p>\n

Nanometer-Accurate Grating Fabrication with Scanning Beam Interference Lithography<\/a> \"pdficon_small\"<\/a>
\nC. G. Chen, P. T. Konkola, R. K. Heilmann, C. Joo, and M. L. Schattenburg
\nProc. SPIE 4936<\/b>, 126 (2002).<\/p>\n

A Generalized Scanning Beam Interference Lithography System for Patterning Gratings with Variable Period Progression<\/a> \"pdficon_small\"<\/a>
\nG. S. Pati, R. K. Heilmann, P. T. Konkola, C. Joo, C. G. Chen, E. Murphy, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 20<\/b>, 2617 (2002).<\/p>\n

Beam Alignment for Scanning Beam Interference Lithography<\/a> \"pdficon_small\"<\/a>
\nC. G. Chen, R. K. Heilmann, C. Joo, P. T. Konkola, G. S. Pati, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 20<\/b>, 3071 (2002).<\/p>\n

Progress Toward a General Grating Pattern Technology Using Phase-Locked Scanning Beams<\/a> \"pdficon_small\"<\/a>
\nM. L. Schattenburg, C. G. Chen, R. K. Heilmann, P. T. Konkola, and G. S. Pati
\nOptical Spectrocopic Techniques and Instrumentation for Atmospheric <\/i>and Space Research IV<\/em>, S. C. Barden and M. G. Mlynczak (eds.),
\nProc. SPIE 4485<\/b>, 378 (2002).<\/p>\n

Image Metrology and System Controls for Scanning Beam Interference Lithography<\/a> (Invited) \"pdficon_small\"<\/a>
\nC. G. Chen, P. T. Konkola, R. K. Heilmann, G. S. Pati, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 19<\/b>, 2335 (2001).<\/p>\n

Digital Heterodyne Interference Fringe Control System<\/a> \"pdficon_small\"<\/a>
\nR. K. Heilmann, P. T. Konkola, C. G. Chen, G. S. Pati, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 19<\/b>, 2342 (2001).<\/p>\n

Beam Steering System and Spatial Filtering Applied to Interference Lithography<\/a> \"pdficon_small\"<\/a>
\nP. T. Konkola, C. G. Chen, R. K. Heilmann, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 18<\/b>, 3282 (2000).<\/p>\n

Relativistic Corrections in Displacement Measuring Interferometry<\/a> \"pdficon_small\"<\/a>
\nR. K. Heilmann, P. T. Konkola, C. G. Chen, and M. L. Schattenburg
\nJ. Vac. Sci. Technol. B 18<\/b>, 3277 (2000).<\/p>\n","protected":false},"excerpt":{"rendered":"

A Brief History of Gratings and the Making of the MIT Nanoruler (pdf)   Related publications: Optimization and Temperature Mapping of an Ultra-High Thermal Stability Environmental Enclosure Y. Zhao, D. L. Trumper, R. K. Heilmann, and M. L. Schattenburg Precision Engineering 34, 164-170 (2010). Spatial-Frequency Multiplication with Multilevel Interference Lithography\u2026 Continue reading<\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"parent":8,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"ngg_post_thumbnail":0},"_links":{"self":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/63"}],"collection":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=63"}],"version-history":[{"count":24,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/63\/revisions"}],"predecessor-version":[{"id":698,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/63\/revisions\/698"}],"up":[{"embeddable":true,"href":"http:\/\/snl.mit.edu\/index.php?rest_route=\/wp\/v2\/pages\/8"}],"wp:attachment":[{"href":"http:\/\/snl.mit.edu\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=63"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}