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Contents
- Complete
List of Papers, Presentations, Theses
- Annual
Reports
- Publication
Links
- 2003-2005
Papers
- 2003-2005
Presentations
- Theses
- Patents
- SNL
Transmission Grating Bibliography
- Archived
links to previous publications
- Press
Annual Reports
2004
2002
2001
2000
SNL
Annual Report published by the Research Laboratory of
Electronics (RLE)
SNL
Annual Report published by the Microsystems Technology
Laboratories (MTL)
SNL
Annual Report published by the Microphotonics Center (MPC)
Publication Links
MIT
Kavli Institute for Astrophysics and Space Research publications
NanoStructures
Laboratory publications
2003-2005 Papers (back
to top)
R117.
"Probing
the cosmic X-ray laboratory with the Chandra HETGS,"
K.A. Flanagan, C.R. Canizares, D. Dewey, A. Fredericks, J.C.
Houk, J.C. Lee, H.L. Marshall and M.L. Schattenburg, Proc.
SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments
for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and
H.D. Tananbaum, 45-56 (2003).
R118.
"Constellation-X Spectroscopy X-ray Telescope (SXT),"
R. Petre, W.W. Zhang, D.A. Content, T. T. Saha, J. Stewart,
J.H. Hair, D.Nguyen, W.A. Podgorski, W.R. Davis, Jr., M.D.
Freeman, L.M. Cohen, M.L. Schattenburg, R.K. Heilmann, Y.
Sun and C. Forest, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes
and Instruments for Astronomy (SPIE, Bellingham, WA), eds.
J.E. Truemper and H.D. Tananbaum, 433-440 (2003).
R119.
"Constellation-X
Spectroscopy X-ray Telescope assembly and alignment,"
W.A. Podgorski, D.A. Content, J.H. Hair, R. Petre, T.T. Saha,
M.L. Schattenburg, J. Stewart and W.W. Zhang, Proc. SPIE 4851,
X-ray and Gamma-ray Telescopes and Instruments for Astronomy
(SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum,
491-502 (2003).
R120.
"Precision
shaping, assembly and metrology of foil optics for x-ray reflection
gratings," C.R. Forest, M.L. Schattenburg, C.G. Chen,
R.K. Heilmann, P. Konkola, J. Przbylowski, Y. Sun, J. You,
S.M. Kahn and D. Golini, Proc. SPIE 4851, X-ray and Gamma-ray
Telescopes and Instruments for Astronomy (SPIE, Bellingham,
WA), eds. J.E. Trumper and H.D. Tananbaum, 538-548 (2003).
R121.
"Constellation-X
soft x-ray telescope segmented optic assembly and alignment
implementation," J.H. Hair, J. Stewart, R. Petre,
W.W. Zhang, D.A. Content, T.T. Saha, W.A. Podgorski, P.E.
Glenn, M.L. Schattenburg, R.K. Heilmann, Y. Sun and G. Nanan,
Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments
for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and
H.D. Tananbaum, 696-707 (2003).
R122.
"Nanometer-accurate
grating fabrication with scanning beam interference lithography,"
G.C. Chen, P.T. Konkola, R.K. Heilmann, C. Joo and M.L. Schattenburg,
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes,
Packaging, and Systems (SPIE, Bellingham, WA) ed. D.K. Sood,
126-134 (2003).
R123.
"Spatial
phase locking with shaped beam lithography," J.G.
Hartley, T.R. Groves, H.I. Smith, M.K. Mondol, J.G. Goodberlet,
M.L. Schattenburg, J. Ferrera and A. Bernshteyn, Rev. Sci.
Instrum. 74, 1377-1379 (2003). (CSR Reprint 01-86)
R124.
"Fabrication
of saw-tooth diffraction gratings using nanoimprint lithography,"
C.-H. Chang, R.K. Heilmann, R.C. Fleming, J. Carter, E. Murphy,
M.L. Schattenburg, T.C. Bailey, R.D. Frankel and R. Voisin,
J. Vac. Sci. Technol. B 21. 2755-2759 (2003).
R125.
"Precision
microcomb design and fabrication for x-ray optics assembly,"
Y. Sun, R.K. Heilmann, C.G. Chen, C.R. Forest and M.L. Schattenburg,
J. Vac. Sci. Technol. B 21, 2970-2974 (2003).
R126.
"Nanometer-level
repeatable metrology using the Nanoruler," P. Konkola,
C. Chen, R.K. Heilmann, C. Joo, J. Montoya, C.-H. Chang and
M.L. Schattenburg, J. Vac. Sci. Technol. B 21. 3097-3101 (2003).
R127.
"Thin
glass optic and silicon wafer deformation and kinematic constraint,"
C. Forest, M. Akilian, G. Vincent, A. Lamure and M.L. Schattenburg,
Proc. of the 18th Annual Meeting of the American Society for
Precision Engineering, 30 (ASPE, Raleigh, NC) 39-42 (2003).
R128.
"Metrology
of thin transparent optics using Shack-Hartmann wavefront
sensing," C.R. Forest, C.R. Canizares, D.R. Neal,
M. McGuirk, A.H. Slocum and M.L. Schattenburg, J. Optical
Engineering 43, 742-753 (2004).
R129.
"Grating
arrays for high-throughput soft x-ray spectrometers,"
A.P. Rasmussen, A. Aquila, J. Bookbinder, C. Chang, E. Gullikson,
R.K. Heilmann, S.M. Kahn, F. Paerels and M.L. Schattenburg,
Proc. SPIE 5168, Optics for EUV, X-ray, and Gamma-ray Astronomy
(SPIE, Bellingham, WA), eds. O. Citterio and S.L. O'Dell,
248-259 (2004).
R130.
"Advances
in reflection grating technology for Constellation-X,"
R.K. Heilmann, M. Akilian, C.-H Chang, C.G. Chen, C. Forest,
C. Joo, P. Konkola, J.C. Montoya, Y. Sun, J. You and M.L.
Schattenburg, Proc. SPIE 5168, Optics for EUV, X-ray, and
Gamma-ray Astronomy (SPIE, Bellingham, WA), eds. O. Citterio
and S.L. O'Dell, 271-282 (2004).
R131.
"Chandra
high-resolution x-ray spectrum of supernova remnant 1E0102.2-7219,"
K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, A.C.
Fredericks, J.C. Houck, T.H. Markert and M. L. Schattenburg,
Ap. J. 605, 230-246 (2004).
R132.
"Dimensional
metrology for nanometer-scale science and engineering: towards
sub-nanometer accurate encoders,"
R. K. Heilmann, C. G. Chen, P. T. Konkola, and M. L. Schattenburg,
Nanotechnology 15, S504-S511 (2004).
R133.
"
High fidelity grating replication using thermal nanoimprint
lithography," C.-H. Chang, J. C. Montoya, M. Akilian,
A. Lapsa, R. K. Heilmann, M. L. Schattenburg, M. Li, K. A.
Flanangan, A. P. Rasmussen, J. F. Seely, J. M. Laming, B.
Kjornrattanawanich, and L. I. Goray, J. Vac. Sci. Technol.
B 22, 3260- 3264 (2004).
R134.
"
Thin-foil reflection gratings for Constellation-X,"
R. K. Heilmann, M. Akilian, C.-H. Chang, C. R. Forest, C.
Joo, A. Lapsa, J. C. Montoya, and M. L. Schattenburg, Proc.
SPIE 5488, UV-Gamma Ray Space Telescope Systems (SPIE, Bellingham,
WA), eds. G. Hasinger and M. J. L. Turner, 283-290 (2004).
R135.
"
The Constellation-X RGS options: raytrace modeling of the
off-plane gratings," K. A. Flanagan, J. E. Davies,
R. K. Heilmann, M. McGuirk, G. R. Ricker, M. L. Schattenburg,
M. Wise, A. Rasmussen, J. Bookbinder, M. Freeman, T. Gaetz,
D. Jerius, D. Nguyen, W. Podgorski, P. Reid, W. Cash, A. Shipley,
D. Gallagher, P. Huang, and S. Jordan, Proc. SPIE 5488, UV-Gamma
Ray Space Telescope Systems (SPIE, Bellingham, WA), eds. G.
Hasinger and M. J. L. Turner, 515-529 (2004).
R136.
"Thin
optics constraint," M. Akilian, C. Forest, A. Slocum,
D. Trumper and M.L. Schattenburg, Proc. of the 19th Annual
Meeting of the American Society for Precision Engineering,
Vol. 34, 209-212 (2004).
R137.
"Measuring
two-axis stage mirror non-flatness using linear/angular interferometers,"
J. Montoya, R.K. Heilmann and M.L. Schattenburg, Proc. of
the 19th Annual Meeting of the American Society for Precision
Engineering, Vol. 34, 382-385 (2004).
R138.
"Repeatable and accurate assembly of x-ray foil optics,"
C.R. Forest et al., J. Precision Engineering (submitted Oct.
2004).
R139.
"Performance metrics and fringe locking control system
design for scanning beam interference lithography," P.T.
Konkola, C.G. Chen, R.K. Heilmann, C. Joo, J.C. Montoya, C.-H.
Chang and M.L. Schattenburg, J. Precision Engineering (submitted
July 20, 2004).
R140.
"Chandra High Energy Transmission Grating: design, fabrication
and ground calibration," C.R. Canizares, J. Davis, D.
Dewey, K.A. Flanagan, E. Galton, D.P. Huenemoerder, T.L. Markert,
H.L. Marshall, M. McGuirk, M.L. Schattenburg, N.S. Schulz,
H.I. Smith and M. Wise, Pub. Astronom. Soc. Pacific (submitted
Aug. 2004).
R141.
"Thin optic constraint," M. Akilian, C.R. Forest,
D.L. Trumper, A.H. Slocum and M.L. Schattenburg, J. Precision
Engineering (submitted Nov. 2004).
R142.
"Describing isotropic and anisotropic out-of-plane deformations
in thin cubic materials using Zernike polynomials," C.-H.
Chang , M. Akilian and M.L. Schattenburg, J. Precision Engineering
(submitted March 2005).
R143.
"Linewidth control in Scanning Beam Interference Lithography,"
J. Montoya, C. Chang, R.K. Heilmann and M.L. Schattenburg,
J. Vac. Sci. Technol. B (in preparation, 2005).
2002-2005 Presentations (back
to top)
P237.
"Spatially resolved plasma diagnostics with x-ray emission
lines of 1E0102.2-7219," A.C. Fredericks, K.A. Flanagan,
C.R. Canizares, D. Dewey, J.C. Houck and M.L. Schattenburg,
201st Meeting of the American Astronomical Society, Seattle,
Washington, Jan. 5-9, 2003 (poster 87.06).
P238.
"Environmental
enclosure for the Nanoruler," M.L. Schattenburg,
P. Konkola, C.-H Chang and C. Joo, Buildings for Advanced
Technology Workshop, National Institute of Standards and Technology,
Gaithersburg, Maryland, Jan. 14-16, 2003 (invited).
P239.
"Nanoaccuracy: an essential element of nanotechnology,"
J.T. Hastings, M.L. Schattenburg, P. Konkola, E.E. Moon and
H.I. Smith, Japan-US Symposium on Tools and Metrology for
Nanotechnology, Cornell University, Ithaca, New York, Jan.
21-24, 2003 (invited).
P240.
"Precision
microcomb design and fabrication for x-ray optics assembly,"
Y. Sun, R.K. Heilmann, C.G. Chen, M.J. Spenko, C.R. Forest
and M.L. Schattenburg, poster presented at the Microsystems
Technology Laboratories Student Research Review, Dedham, Massachusetts,
Jan. 28, 2003.
P241.
"Reflection Grating Spectrometer grating array,"
M.L. Schattenburg, NASA Constellation X-ray Mission - Technology
Readiness and Implementation Plan Site Visit Briefing, NASA
Goddard Space Flight Center, Greenbelt, Maryland, Mar. 20,
2003.
P242.
"Design
and analysis of a scanning beam interference lithography system
for patterning gratings with nanometer-level distortion,"
P.T. Konkola, Ph.D. Defense, MIT Department of Mechanical
Engineering, Cambridge, Massachusetts, Apr. 3, 2003.
P243.
"The
importance of metrology in nanofabrication," M.L.
Schattenburg, MIT Microsystems Technology Laboratories - Microlunch
Seminar, Cambridge, Massachusetts, Apr. 8, 2003.
P244.
"The role of nanometer-level accuracy and precision in
nanomanufacturing," H.I. Smith and M.L. Schattenburg,
First International Symposium on Nanomanufacturing, Cambridge,
Massachusetts, Apr. 24-26, 2003 (invited).
P245.
"Beam
Alignment and Image Metrology for Scanning Beam Interference
Lithography - Fabricating Gratings with Nanometer Phase Accuracy,"
C.G. Chen, Ph.D. Defense, MIT Department of Electrical Engineering
and Computer Science, Cambridge, Massachusetts, Apr. 29, 2003.
P246.
"X-ray microscopy with atomic resolution," I. McNulty,
J. Miao and M.L. Schattenburg, MIT X-ray Laser Collaboration
Workshop, MIT-Bates Linear Accelerator Center, Middleton,
Massachusetts, May 2, 2003.
P247.
"Nano-metrology
using the Nanoruler," M.L. Schattenburg, P. Konkola,
C. Chen, R.K. Heilmann, C. Joo, J. Montoya and C.-H. Chang,
Defense Advanced Research Projects Agency (DARPA) - Advanced
Lithography Program Review, Santa Fe, New Mexico, May 5-8,
2003.
P248.
"Con-X
reflection gratings: process development updates,"
R.K. Heilmann, C.-H. Chang, Y. Sun, C.G. Chen, C.R. Forest,
P.T. Konkola, C. Joo, J. Montoya, M. Akilian, J. You, E. Murphy,
R. Fleming, and M.L. Schattenburg, Constellation X Mission
Facility Science Team Meeting, Columbia University, New York,
New York, May 7-8, 2003.
P249.
"Nanometer-level
repeatable metrology using the Nanoruler," P. Konkola,
C. Chen, R.K. Heilmann, C. Joo, J. Montoya, C.-H. Chang and
M.L. Schattenburg, 47h International Conference on Electron,
Ion and Photon Beam Technology and Nanofabrication, Tampa,
Florida, May 27-30, 2003 (paper 2B3)
P250.
"Precision
microcomb design and fabrication for x-ray optics,"
Y. Sun, R.K. Heilmann, C.G. Chen, M.J. Spenko, C.R. Forest
and M.L. Schattenburg, 47h International Conference on Electron,
Ion and Photon Beam Technology and Nanofabrication, Tampa,
Florida, May 27-30, 2003 (poster PJ12).
P251.
"Fabrication
of saw-tooth diffraction gratings using nanoimprint lithography,"
C.-H. Chang, J. Carter, E. Murphy, M.L. Schattenburg, T.C.
Bailey, R.D. Frankel and R. Voisin, 47h International Conference
on Electron, Ion and Photon Beam Technology and Nanofabrication,
Tampa, Florida, May 27-30, 2003 (poster PC7).
P252.
"Precision
Microcomb Progress Report," R. K. Heilmann, Y. Sun,
C. G. Chen, C. R. Forest, and M.L.
Schattenburg, Constellation-X SXT Technical Interchange Meeting,
Goddard Space Flight Center, Greenbelt, Maryland, June 11,
2003.
P253.
"Reengineering project of the thin foil optic holder,"
A. Lamure, Space Nanotechnology Laboratory Internship Presentation,
MIT Kavli Institute for Astrophysics and Space Research, Cambridge,
Massachusetts, June 13, 2003.
P254.
"Grating arrays for high-throughput soft x-ray spectrometers,"
A.P. Rasmussen, J. Bookbinder, W. Cash, Jr., R.K. Heilmann,
S.M. Kahn, F. Paerels and M.L. Schattenburg, SPIE Conference
AM121: Optics for EUV, X-ray, and Gamma-ray Astronomy (O.
Citterio and S.L. O'Dell), San Diego, California, Aug. 3-8,
2003 (paper 5168-28).
P255.
"Advances
in reflection grating technology for Constellation-X,"
R. K. Heilmann, M. Akilian, C. Chang, C.G. Chen, C. Forest,
C. Joo, P. Konkola, J. Montoya, Y. Sun, J. You, and M. L.
Schattenburg, SPIE Conference AM121: Optics for EUV, X-ray,
and Gamma-ray Astronomy (O. Citterio and S.L. O'Dell), San
Diego, California, Aug. 3-8, 2003 (paper 5168-30).
P256.
"On
improving the dynamic range of the CLAS-2D Shack-Hartmann
system," A. Lapsa, Space Nanotechnology Laboratory
Internship Presentation, MIT Kavli Institute for Astrophysics
and Space Research, Cambridge, Massachusetts, Aug. 15, 2003.
P257.
"The
Space Nanotechnology Lab: from nanometers to gigaparsecs,"
R.K. Heilmann, M. Akilian, C.-H. Chang, R. Fleming, C. Joo,
J. Montoya, E. Murphy, A. Torkaman and M.L. Schattenburg,
MIT Astrophysics Internal Symposium, Cambridge, Massachusetts,
Sept. 9-11, 2003.
P258.
"Nanometrology
in nanomanufacturing," M.L. Schattenburg, NASA Tech
Briefs - Nanotech 2003 Conference, Cambridge, Massachusetts,
Oct. 23-24, 2003 (invited).
P259.
"Thin
glass optic and silicon wafer deformation and kinematic constraint,"
C. Forest, M. Akilian, A. Lapsa, G. Vincent, A. Lamure and
M.L. Schattenburg, 18th Annual Meeting of the American Society
of Precision Engineering, Portland, Oregon, Oct. 26-31, 2003
(paper III-2).
P260.
"Reflection
grating development update," R.K. Heilmann, M. Akilian,
C.-H. Chang, C.R. Forest, C. Joo, J.C. Montoya, A. Torkaman
and M.L. Schattenburg, Constellation X Mission Facility Science
Team Meeting, NASA Goddard Space Flight Center, Greenbelt,
Maryland, Nov. 20, 2003.
P261.
"The
MIT Nanoruler: a tool for patterning large high-accuracy gratings,"
M.L. Schattenburg, University of Rochester, Laboratory for
Laser Energetics, Workshop on Large Scale MLD Gratings for
OMEGA EP, Rochester, NY, December 16, 2003 (invited).
P262. "The
Space Nanotechnology Lab: high resolution x-ray optics with
nanometer precision," R.K. Heilmann, MIT IAP symposium
Frontiers of Astronomy, Astrophysics, and Space Science, Cambridge,
Massachusetts, Jan. 20, 2004.
P263.
"The
metrology crisis in nano manufacturing," M.L. Schattenburg,
National Nanotechnology Initiative Interagency Workshop on
Instrumentation and Metrology for Nanotechnology, National
Institute of Standards and Technology, Gaithersburg, Maryland,
Jan. 27-29, 2004 (invited).
P264.
"Fabrication
of saw-tooth diffraction gratings using nanoimprint lithography,"C.-H.
Chang, R.K. Heilmann and M.L. Schattenburg, poster presented
at the Microsystems Technology Laboratories Student Research
Review, Waterville Valley, New Hampshire, Jan. 28-29, 2004.
P265.
"Dimensional
metrology for nanoscale science and engineering,"
R.K. Heilmann and M.L. Schattenburg., IEEE Conference on Nanoscale
Devices and System Integration, Miami, Florida, Feb. 15-19,
2004 (invited paper F2).
P266.
"Fabrication
of saw-tooth diffraction gratings using nanoimprint lithography,"
C.-H. Chang, J.C. Montoya, C. Joo, M. Akilian, A. Lapsa, R.K.
Heilmann, M.L. Schattenburg, M. Li and A. Rasmussen, poster
presented at the MIT Photonics & Roadmapping Spring Conference,
Cambridge, Massachusetts, May 3-4, 2004.
P267.
"Metrology
for nanometer scale science and engineering," M.L.
Schattenburg, R.K. Heilmann and H.I. Smith, presented at The
1st China-US Symposium on Nano Science and Technology, Beijing,
China, May 17-20, 2004 (invited).
P268.
"The
MIT Nanoruler: A tool for patterning large high-accuracy gratings,"
M.L. Schattenburg, Institute for Laser Engineering, Osaka
University, Osaka, Japan, May 22, 2004 (invited).
P269.
"High
fidelity grating replication using thermal nanoimprint lithography,"
C.-H. Chang, J.C. Montoya, M. Akilian, A. Lapsa, R.K. Heilmann
and M.L. Schattenburg, 48th International Conference on Electron,
Ion and Photon Beam Technology and Nanofabrication, San Diego,
California, June 1-4, 2004 (paper 6B5).
P270.
"Thin
foil reflection gratings for Constellation-X," R.K.
Heilmann, M. Akilian, C.-H. Chang, C.R. Forest, C. Joo, A.
Lapsa, J.C. Montoya and M.L. Schattenburg, presented at the
SPIE Symposium on Astronomical Telescopes and Instrumentation
2004 -- Space Telescope Systems (UV-Gamma) (AS02), Glasgow,
Scotland, June 21-25, 2004 (paper 5488-82).
P271.
"The Constellation-X RGS options: raytrace modeling of
the off-plane gratings," K.A. Flanagan, J.E. Davis, R.K.
Heilmann, M. McGuirk, G.R. Ricker, M.L. Schattenburg, M. Wise,
A. Rasmussen, J. Bookbinder, M. Freeman, T. Gaetz, D. Jerius,
D. Nguyen, W. Podgorski, P. Reid, W. Cash, A. Shipley, D.
Gallagher, P. Huang, and S. Jordan, presented at the SPIE
Symposium on Astronomical Telescopes and Instrumentation 2004
-- UV-Gamma Ray Space Telescope Systems, Glasgow, Scotland,
June 21-25, 2004 (paper 5488-31).
P272.
"Nanometer
precision metrology and constraint of thin optics for a high
resolution x-ray telescope," M. Akilian, C.-H.Chang,
C. Chen, C.R. Forest, R.K. Heilmann, C. Joo, P. Konkola, J.
Montoya, Y. Sun and M.L. Schattenburg, Institute for Experimental
Physics, Technische Universität Graz, Graz, Austria,
July 15, 2004 (invited).
P273.
"Large-area
gratings for nanometer-accurate positioning and metrology,"
R.K. Heilmann and M.L. Schattenburg, Center for Functional
Nanomaterials Seminar, Brookhaven National Laboratory, Upton,
NY, July 21, 2004 (invited).
P274.
"Space
Nanotechnology Laboratory," M.L. Schattenburg, MIT
Kavli Institute for Astrophysics and Space Research Advisory
Committee Review, Cambridge, MA, Sept. 20, 2004.
P275.
"The
Nanoruler: A tool for rapid high-precision patterning of large-area
gratings," R.K. Heilmann, C.G. Chen, P.T. Konkola
and M.L. Schattenburg, poster presented at the R&D 100
Award Ceremony, Chicago, Illinois, Oct. 14, 2004 (invited).
P276.
"Advances
in x-ray reflection grating technology," M. Akilian,
C.-H. Chang, R.K. Heilmann, J. Montoya and M.L. Schattenburg,
Constellation-X Mission Facility Science Team Meeting, NASA
Goddard Space Flight Center, Greenbelt, Maryland, Oct. 14-15,
2004.
P277.
"Thin
optics constraint," M. Akilian, C. Forest, A. Slocum,
D. Trumper and M.L. Schattenburg, 19th Annual Meeting of the
American Society of Precision Engineering, Orlando, Florida,
Oct. 24-29, 2004 (Poster 2, Equipment, Machines & Instruments
- Design & Testing).
P278.
"Measuring
two-axis stage mirror non-flatness using linear/angular interferometers,"
J. Montoya, R.K. Heilmann and M.L. Schattenburg, 19th Annual
Meeting of the American Society of Precision Engineering,
Orlando, Florida, Oct. 24-29, 2004 (Poster 5, Metrology -
Analysis & Modeling).
P279.
"Metrology
for nanometer scale lithography," M.L. Schattenburg
and R.K. Heilmann, Materials Research Society Symposium on
Progress in Semiconductor Materials IV - Electronic and Optoelectronic
Applications, Boston, MA, Nov. 30, 2004 (invited paper C3.4).
P280. "Nanoruler II progress report," M.L.
Schattenburg, Laboratory for Laser Energetics, Rochester,
New York, Jan. 13, 2005.
P281.
"The MIT Nanoruler: A tool for patterning large high-accuracy
gratings," M.L. Schattenburg, Lawrence Livermore National
Laboratory, Livermore, California, Jan. 20, 2005 (invited).
P282.
"How to build a spectroscopy x-ray telescope," R.K.
Heilmann, MIT CSR IAP Lecture Series Frontiers of Astronomy,
Astrophysics, and Space Science & Technology, Cambridge,
Massachusetts, Jan. 20, 2005.
P283.
"Toward improved linewidth control in scanning beam interference
lithography," J. Montoya, R.K Heilmann and M.L Schattenburg,
poster presented at the Microsystems Technology Laboratories
Annual Research Conference, Waterville Valley Conference &
Event Center, Waterville Valley, NH, Jan. 26-27, 2005.
P284.
"Large-area lithography: where special relativity and
nanotechnology meet," R.K. Heilmann, J.C. Montoya and
M.L. Schattenburg, Joint New England Sections of APS and AAPT
2005 Spring Meeting at MIT, Cambridge, MA, April 1-2, 2005.
(submitted March 4, 2005).
P285.
"Linewidth control in Scanning Beam Interference Lithography,"
J. Montoya, C. Chang, R.K. Heilmann and M.L. Schattenburg,
49th International Conference on Electron, Ion and Photon
Beam Technology and Nanofabrication, Orlando, Florida, May
31-June 3, 2005 (submitted February 4, 2005).
P286.
"Shaping and assembly of thin grazing-incidence reflection
gratings for soft-x-ray spectroscopy telescopes," R.K.
Heilmann et al., SPIE conference on Optics for EUV, X-ray,
and Gamma-ray Astronomy II, San Diego, CA, Aug. 3, 2005 (paper
5900-9).
P287.
"TBD Fringe locking, Chang et al., 20th Annual Meeting
of the American Society of Precision Engineering, Norfolk,
Virginia, Oct. 9-14, 2005 (submitted).
P288.
"Measurment of milli-degree temperature gradients in
environmental enclosures," Y. Zhao, C.-H. Chang, J. Montoya,
R. Heilmann and M.L. Schattenburg, 20th Annual Meeting of
the American Society of Precision Engineering, Norfolk, Virginia,
Oct. 9-14, 2005 (submitted).
P289.
"TBD slumping," Akilian et al., 20th Annual Meeting
of the American Society of Precision Engineering, Norfolk,
Virginia, Oct. 9-14, 2005 (submitted).
P290.
"Pattering ultra-precision gratings for dimensional metrology,"
M.L. Schattenburg, Symposium on Nanoscale Science & Engineering:
Convergence of the Top Down and Bottom Up Approaches, University
of North Carolina, Charlotte, Oct 24-25, 2005 (invited).
Theses (back
to top)
Bachelor's Theses
TB6.
Alan Heins, An
Investigation of Crystal Fibers at Visible and Ultraviolet
Wavelengths, Bachelor's Thesis, MIT Department of Physics,
June 2002.
Masters Theses
TM6.
Carl Gang Chen,
Microcomb Fabrication for High Accuracy Foil X-ray Telescope
Assembly and Vector Gaussian Beam Modeling, MIT Department
of Electrical Engineering and Computer Science, June 2000.
TM7.
Michael E. Walsh, Nanostructuring
Magnetic Thin Films Using Interference Lithography, M.S.E.E.C.S.
2000.
TM8.
Olivier Mongrard, High
Accuracy Foil Optics for X-ray Astronomy, Master's Thesis,
MIT Department of Aeronautical and Astronautical Engineering,
September 2001.
TM9.
Craig Forest, X-ray
Telescope Foil Optics: Assembly, Metrology, and Constraint,
Master's Thesis, Department of Mechanical Engineering, May
2003.
TM10.
Chulmin Joo, Image
Grating Metrology using a Fresnel Zone Plate, Master's
Thesis, Department of Mechanical Engineering, September 2003.
TM11.
Chih-Hao-Chang,
Fabrication of Extremely Smooth Reflection Gratings, Master's
Thesis, Department of Mechanical Engineering, June 2004.
PhD Dissertations
TD11.
Dr. Juan Ferrera, Nanometer-Scale
Placement in Electron-Beam Lithography, E.E.&C.S. 1999.
TD12.
Dr. Thomas E. Murphy, Design,
Fabrication and Measurement of Integrated Bragg Grating Optical
Filters, Ph.D. Thesis, MIT Department of Electrical Engineering
and Computer Science, February 2001.
TD13.
Dr. Maya Farhoud, Fabrication
and Characterization of Nanostructured Magnetic Particles
for Applications in Data Storage, Ph.D. Thesis, MIT Department
of Electrical Engineering and Computer Science, June 2001.
TD14.
Dr. Paul Thomas Konkola, Design
and Analysis of a Scanning Beam Interference Lithography System
for Patterning Gratings with Nanometer-Level Distortion,
Ph.D. Thesis, Department of Mechanical Engineering, April
2003.
TD15.
Dr. Carl Gang Chen, Beam
Alignment and Image Metrology for Scanning Beam Interference
Lithography - Fabricating Gratings with Nanometer Phase Accuracy,
Ph.D. Thesis, Department of Electrical Engineering and Computer
Science, April 2003.
TD19.
Dr. Juan C. Montoya, Towards
Nano-accuracy in Scanning Beam Interference Lithography,
Ph.D. Thesis, Department of Electrical Engineering and Computer
Science, June 2006.
Patents
(back
to top)
U1.
"A
lithography mask with a p-phase
shifting attenuator," H.I. Smith, E.H. Anderson and
M.L. Schattenburg, U.S. Patent No. 4,890,309 (December 26,
1989).
U2.
"Energy
beam locating," H.I. Smith, E.H. Anderson and M.L.
Schattenburg, U.S. Patent No. 5,136,169 (August 4, 1992).
U3.
"Holographic
lithography," E.H. Anderson, H.I. Smith and M.L.
Schattenburg, U.S. Patent No. 5,142,385 (August 25, 1992).
U4.
"X-ray
lithography masking," H.I. Smith, M.L. Schattenburg,
J.M. Carter and M.H. Lim, U.S. Patent No. 5,809,103 (September
15, 1998).
U5.
"A method
and system for interference lithography utilizing phase-locked
scanning beams," M.L. Schattenburg and P.N. Everett,
U.S. Patent Ser. No. 09/711,019.
U6.
"Spatial
phase locking with shaped electron beam lithography,"
J.G. Hartley, T.R. Groves, J. Ferrera, J.G. Goodberlet, M.K.
Mondol, M. L. Schattenburg and H.I. Smith, U. S. Patent No.
6,822,248 B2 (November 23, 2004).
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