Papers

PAPERS

Contents

Annual Reports
2004
2002
2001
2000
SNL Annual Report published by the Research Laboratory of Electronics (RLE)
SNL Annual Report published by the Microsystems Technology Laboratories (MTL)
SNL Annual Report published by the Microphotonics Center (MPC)

Publication Links
MIT Kavli Institute for Astrophysics and Space Research publications
NanoStructures Laboratory publications

2003-2005 Papers (back to top)

R117. "Probing the cosmic X-ray laboratory with the Chandra HETGS," K.A. Flanagan, C.R. Canizares, D. Dewey, A. Fredericks, J.C. Houk, J.C. Lee, H.L. Marshall and M.L. Schattenburg, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 45-56 (2003).

R118. "Constellation-X Spectroscopy X-ray Telescope (SXT)," R. Petre, W.W. Zhang, D.A. Content, T. T. Saha, J. Stewart, J.H. Hair, D.Nguyen, W.A. Podgorski, W.R. Davis, Jr., M.D. Freeman, L.M. Cohen, M.L. Schattenburg, R.K. Heilmann, Y. Sun and C. Forest, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 433-440 (2003).

R119. "Constellation-X Spectroscopy X-ray Telescope assembly and alignment," W.A. Podgorski, D.A. Content, J.H. Hair, R. Petre, T.T. Saha, M.L. Schattenburg, J. Stewart and W.W. Zhang, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 491-502 (2003).

R120. "Precision shaping, assembly and metrology of foil optics for x-ray reflection gratings," C.R. Forest, M.L. Schattenburg, C.G. Chen, R.K. Heilmann, P. Konkola, J. Przbylowski, Y. Sun, J. You, S.M. Kahn and D. Golini, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Trumper and H.D. Tananbaum, 538-548 (2003).

R121. "Constellation-X soft x-ray telescope segmented optic assembly and alignment implementation," J.H. Hair, J. Stewart, R. Petre, W.W. Zhang, D.A. Content, T.T. Saha, W.A. Podgorski, P.E. Glenn, M.L. Schattenburg, R.K. Heilmann, Y. Sun and G. Nanan, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 696-707 (2003).

R122. "Nanometer-accurate grating fabrication with scanning beam interference lithography," G.C. Chen, P.T. Konkola, R.K. Heilmann, C. Joo and M.L. Schattenburg, Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems (SPIE, Bellingham, WA) ed. D.K. Sood, 126-134 (2003).

R123. "Spatial phase locking with shaped beam lithography," J.G. Hartley, T.R. Groves, H.I. Smith, M.K. Mondol, J.G. Goodberlet, M.L. Schattenburg, J. Ferrera and A. Bernshteyn, Rev. Sci. Instrum. 74, 1377-1379 (2003). (CSR Reprint 01-86)

R124. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," C.-H. Chang, R.K. Heilmann, R.C. Fleming, J. Carter, E. Murphy, M.L. Schattenburg, T.C. Bailey, R.D. Frankel and R. Voisin, J. Vac. Sci. Technol. B 21. 2755-2759 (2003).

R125. "Precision microcomb design and fabrication for x-ray optics assembly," Y. Sun, R.K. Heilmann, C.G. Chen, C.R. Forest and M.L. Schattenburg, J. Vac. Sci. Technol. B 21, 2970-2974 (2003).

R126. "Nanometer-level repeatable metrology using the Nanoruler," P. Konkola, C. Chen, R.K. Heilmann, C. Joo, J. Montoya, C.-H. Chang and M.L. Schattenburg, J. Vac. Sci. Technol. B 21. 3097-3101 (2003).

R127. "Thin glass optic and silicon wafer deformation and kinematic constraint," C. Forest, M. Akilian, G. Vincent, A. Lamure and M.L. Schattenburg, Proc. of the 18th Annual Meeting of the American Society for Precision Engineering, 30 (ASPE, Raleigh, NC) 39-42 (2003).

R128. "Metrology of thin transparent optics using Shack-Hartmann wavefront sensing," C.R. Forest, C.R. Canizares, D.R. Neal, M. McGuirk, A.H. Slocum and M.L. Schattenburg, J. Optical Engineering 43, 742-753 (2004).

R129. "Grating arrays for high-throughput soft x-ray spectrometers," A.P. Rasmussen, A. Aquila, J. Bookbinder, C. Chang, E. Gullikson, R.K. Heilmann, S.M. Kahn, F. Paerels and M.L. Schattenburg, Proc. SPIE 5168, Optics for EUV, X-ray, and Gamma-ray Astronomy (SPIE, Bellingham, WA), eds. O. Citterio and S.L. O'Dell, 248-259 (2004).

R130. "Advances in reflection grating technology for Constellation-X," R.K. Heilmann, M. Akilian, C.-H Chang, C.G. Chen, C. Forest, C. Joo, P. Konkola, J.C. Montoya, Y. Sun, J. You and M.L. Schattenburg, Proc. SPIE 5168, Optics for EUV, X-ray, and Gamma-ray Astronomy (SPIE, Bellingham, WA), eds. O. Citterio and S.L. O'Dell, 271-282 (2004).

R131. "Chandra high-resolution x-ray spectrum of supernova remnant 1E0102.2-7219," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, A.C. Fredericks, J.C. Houck, T.H. Markert and M. L. Schattenburg, Ap. J. 605, 230-246 (2004).

R132. "Dimensional metrology for nanometer-scale science and engineering: towards sub-nanometer accurate encoders," R. K. Heilmann, C. G. Chen, P. T. Konkola, and M. L. Schattenburg, Nanotechnology 15, S504-S511 (2004).

R133. " High fidelity grating replication using thermal nanoimprint lithography," C.-H. Chang, J. C. Montoya, M. Akilian, A. Lapsa, R. K. Heilmann, M. L. Schattenburg, M. Li, K. A. Flanangan, A. P. Rasmussen, J. F. Seely, J. M. Laming, B. Kjornrattanawanich, and L. I. Goray, J. Vac. Sci. Technol. B 22, 3260- 3264 (2004).

R134. " Thin-foil reflection gratings for Constellation-X," R. K. Heilmann, M. Akilian, C.-H. Chang, C. R. Forest, C. Joo, A. Lapsa, J. C. Montoya, and M. L. Schattenburg, Proc. SPIE 5488, UV-Gamma Ray Space Telescope Systems (SPIE, Bellingham, WA), eds. G. Hasinger and M. J. L. Turner, 283-290 (2004).

R135. " The Constellation-X RGS options: raytrace modeling of the off-plane gratings," K. A. Flanagan, J. E. Davies, R. K. Heilmann, M. McGuirk, G. R. Ricker, M. L. Schattenburg, M. Wise, A. Rasmussen, J. Bookbinder, M. Freeman, T. Gaetz, D. Jerius, D. Nguyen, W. Podgorski, P. Reid, W. Cash, A. Shipley, D. Gallagher, P. Huang, and S. Jordan, Proc. SPIE 5488, UV-Gamma Ray Space Telescope Systems (SPIE, Bellingham, WA), eds. G. Hasinger and M. J. L. Turner, 515-529 (2004).

R136. "Thin optics constraint," M. Akilian, C. Forest, A. Slocum, D. Trumper and M.L. Schattenburg, Proc. of the 19th Annual Meeting of the American Society for Precision Engineering, Vol. 34, 209-212 (2004).

R137. "Measuring two-axis stage mirror non-flatness using linear/angular interferometers," J. Montoya, R.K. Heilmann and M.L. Schattenburg, Proc. of the 19th Annual Meeting of the American Society for Precision Engineering, Vol. 34, 382-385 (2004).

R138. "Repeatable and accurate assembly of x-ray foil optics," C.R. Forest et al., J. Precision Engineering (submitted Oct. 2004).

R139. "Performance metrics and fringe locking control system design for scanning beam interference lithography," P.T. Konkola, C.G. Chen, R.K. Heilmann, C. Joo, J.C. Montoya, C.-H. Chang and M.L. Schattenburg, J. Precision Engineering (submitted July 20, 2004).

R140. "Chandra High Energy Transmission Grating: design, fabrication and ground calibration," C.R. Canizares, J. Davis, D. Dewey, K.A. Flanagan, E. Galton, D.P. Huenemoerder, T.L. Markert, H.L. Marshall, M. McGuirk, M.L. Schattenburg, N.S. Schulz, H.I. Smith and M. Wise, Pub. Astronom. Soc. Pacific (submitted Aug. 2004).

R141. "Thin optic constraint," M. Akilian, C.R. Forest, D.L. Trumper, A.H. Slocum and M.L. Schattenburg, J. Precision Engineering (submitted Nov. 2004).

R142. "Describing isotropic and anisotropic out-of-plane deformations in thin cubic materials using Zernike polynomials," C.-H. Chang , M. Akilian and M.L. Schattenburg, J. Precision Engineering (submitted March 2005).

R143. "Linewidth control in Scanning Beam Interference Lithography," J. Montoya, C. Chang, R.K. Heilmann and M.L. Schattenburg, J. Vac. Sci. Technol. B (in preparation, 2005).

2002-2005 Presentations (back to top)

P237. "Spatially resolved plasma diagnostics with x-ray emission lines of 1E0102.2-7219," A.C. Fredericks, K.A. Flanagan, C.R. Canizares, D. Dewey, J.C. Houck and M.L. Schattenburg, 201st Meeting of the American Astronomical Society, Seattle, Washington, Jan. 5-9, 2003 (poster 87.06).

P238. "Environmental enclosure for the Nanoruler," M.L. Schattenburg, P. Konkola, C.-H Chang and C. Joo, Buildings for Advanced Technology Workshop, National Institute of Standards and Technology, Gaithersburg, Maryland, Jan. 14-16, 2003 (invited).

P239. "Nanoaccuracy: an essential element of nanotechnology," J.T. Hastings, M.L. Schattenburg, P. Konkola, E.E. Moon and H.I. Smith, Japan-US Symposium on Tools and Metrology for Nanotechnology, Cornell University, Ithaca, New York, Jan. 21-24, 2003 (invited).

P240. "Precision microcomb design and fabrication for x-ray optics assembly," Y. Sun, R.K. Heilmann, C.G. Chen, M.J. Spenko, C.R. Forest and M.L. Schattenburg, poster presented at the Microsystems Technology Laboratories Student Research Review, Dedham, Massachusetts, Jan. 28, 2003.

P241. "Reflection Grating Spectrometer grating array," M.L. Schattenburg, NASA Constellation X-ray Mission - Technology Readiness and Implementation Plan Site Visit Briefing, NASA Goddard Space Flight Center, Greenbelt, Maryland, Mar. 20, 2003.

P242. "Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortion," P.T. Konkola, Ph.D. Defense, MIT Department of Mechanical Engineering, Cambridge, Massachusetts, Apr. 3, 2003.

P243. "The importance of metrology in nanofabrication," M.L. Schattenburg, MIT Microsystems Technology Laboratories - Microlunch Seminar, Cambridge, Massachusetts, Apr. 8, 2003.

P244. "The role of nanometer-level accuracy and precision in nanomanufacturing," H.I. Smith and M.L. Schattenburg, First International Symposium on Nanomanufacturing, Cambridge, Massachusetts, Apr. 24-26, 2003 (invited).

P245. "Beam Alignment and Image Metrology for Scanning Beam Interference Lithography - Fabricating Gratings with Nanometer Phase Accuracy," C.G. Chen, Ph.D. Defense, MIT Department of Electrical Engineering and Computer Science, Cambridge, Massachusetts, Apr. 29, 2003.

P246. "X-ray microscopy with atomic resolution," I. McNulty, J. Miao and M.L. Schattenburg, MIT X-ray Laser Collaboration Workshop, MIT-Bates Linear Accelerator Center, Middleton, Massachusetts, May 2, 2003.

P247. "Nano-metrology using the Nanoruler," M.L. Schattenburg, P. Konkola, C. Chen, R.K. Heilmann, C. Joo, J. Montoya and C.-H. Chang, Defense Advanced Research Projects Agency (DARPA) - Advanced Lithography Program Review, Santa Fe, New Mexico, May 5-8, 2003.

P248. "Con-X reflection gratings: process development updates," R.K. Heilmann, C.-H. Chang, Y. Sun, C.G. Chen, C.R. Forest, P.T. Konkola, C. Joo, J. Montoya, M. Akilian, J. You, E. Murphy, R. Fleming, and M.L. Schattenburg, Constellation X Mission Facility Science Team Meeting, Columbia University, New York, New York, May 7-8, 2003.

P249. "Nanometer-level repeatable metrology using the Nanoruler," P. Konkola, C. Chen, R.K. Heilmann, C. Joo, J. Montoya, C.-H. Chang and M.L. Schattenburg, 47h International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, Florida, May 27-30, 2003 (paper 2B3)

P250. "Precision microcomb design and fabrication for x-ray optics," Y. Sun, R.K. Heilmann, C.G. Chen, M.J. Spenko, C.R. Forest and M.L. Schattenburg, 47h International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, Florida, May 27-30, 2003 (poster PJ12).

P251. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," C.-H. Chang, J. Carter, E. Murphy, M.L. Schattenburg, T.C. Bailey, R.D. Frankel and R. Voisin, 47h International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, Florida, May 27-30, 2003 (poster PC7).

P252. "Precision Microcomb Progress Report," R. K. Heilmann, Y. Sun, C. G. Chen, C. R. Forest, and M.L.
Schattenburg, Constellation-X SXT Technical Interchange Meeting, Goddard Space Flight Center, Greenbelt, Maryland, June 11, 2003.

P253. "Reengineering project of the thin foil optic holder," A. Lamure, Space Nanotechnology Laboratory Internship Presentation, MIT Kavli Institute for Astrophysics and Space Research, Cambridge, Massachusetts, June 13, 2003.

P254. "Grating arrays for high-throughput soft x-ray spectrometers," A.P. Rasmussen, J. Bookbinder, W. Cash, Jr., R.K. Heilmann, S.M. Kahn, F. Paerels and M.L. Schattenburg, SPIE Conference AM121: Optics for EUV, X-ray, and Gamma-ray Astronomy (O. Citterio and S.L. O'Dell), San Diego, California, Aug. 3-8, 2003 (paper 5168-28).

P255. "Advances in reflection grating technology for Constellation-X," R. K. Heilmann, M. Akilian, C. Chang, C.G. Chen, C. Forest, C. Joo, P. Konkola, J. Montoya, Y. Sun, J. You, and M. L. Schattenburg, SPIE Conference AM121: Optics for EUV, X-ray, and Gamma-ray Astronomy (O. Citterio and S.L. O'Dell), San Diego, California, Aug. 3-8, 2003 (paper 5168-30).

P256. "On improving the dynamic range of the CLAS-2D Shack-Hartmann system," A. Lapsa, Space Nanotechnology Laboratory Internship Presentation, MIT Kavli Institute for Astrophysics and Space Research, Cambridge, Massachusetts, Aug. 15, 2003.

P257. "The Space Nanotechnology Lab: from nanometers to gigaparsecs," R.K. Heilmann, M. Akilian, C.-H. Chang, R. Fleming, C. Joo, J. Montoya, E. Murphy, A. Torkaman and M.L. Schattenburg, MIT Astrophysics Internal Symposium, Cambridge, Massachusetts, Sept. 9-11, 2003.

P258. "Nanometrology in nanomanufacturing," M.L. Schattenburg, NASA Tech Briefs - Nanotech 2003 Conference, Cambridge, Massachusetts, Oct. 23-24, 2003 (invited).

P259. "Thin glass optic and silicon wafer deformation and kinematic constraint," C. Forest, M. Akilian, A. Lapsa, G. Vincent, A. Lamure and M.L. Schattenburg, 18th Annual Meeting of the American Society of Precision Engineering, Portland, Oregon, Oct. 26-31, 2003 (paper III-2).

P260. "Reflection grating development update," R.K. Heilmann, M. Akilian, C.-H. Chang, C.R. Forest, C. Joo, J.C. Montoya, A. Torkaman and M.L. Schattenburg, Constellation X Mission Facility Science Team Meeting, NASA Goddard Space Flight Center, Greenbelt, Maryland, Nov. 20, 2003.

P261. "The MIT Nanoruler: a tool for patterning large high-accuracy gratings," M.L. Schattenburg, University of Rochester, Laboratory for Laser Energetics, Workshop on Large Scale MLD Gratings for OMEGA EP, Rochester, NY, December 16, 2003 (invited).

P262. "The Space Nanotechnology Lab: high resolution x-ray optics with nanometer precision," R.K. Heilmann, MIT IAP symposium Frontiers of Astronomy, Astrophysics, and Space Science, Cambridge, Massachusetts, Jan. 20, 2004.

P263. "The metrology crisis in nano manufacturing," M.L. Schattenburg, National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology, National Institute of Standards and Technology, Gaithersburg, Maryland, Jan. 27-29, 2004 (invited).

P264. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography,"C.-H. Chang, R.K. Heilmann and M.L. Schattenburg, poster presented at the Microsystems Technology Laboratories Student Research Review, Waterville Valley, New Hampshire, Jan. 28-29, 2004.

P265. "Dimensional metrology for nanoscale science and engineering," R.K. Heilmann and M.L. Schattenburg., IEEE Conference on Nanoscale Devices and System Integration, Miami, Florida, Feb. 15-19, 2004 (invited paper F2).

P266. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," C.-H. Chang, J.C. Montoya, C. Joo, M. Akilian, A. Lapsa, R.K. Heilmann, M.L. Schattenburg, M. Li and A. Rasmussen, poster presented at the MIT Photonics & Roadmapping Spring Conference, Cambridge, Massachusetts, May 3-4, 2004.

P267. "Metrology for nanometer scale science and engineering," M.L. Schattenburg, R.K. Heilmann and H.I. Smith, presented at The 1st China-US Symposium on Nano Science and Technology, Beijing, China, May 17-20, 2004 (invited).

P268. "The MIT Nanoruler: A tool for patterning large high-accuracy gratings," M.L. Schattenburg, Institute for Laser Engineering, Osaka University, Osaka, Japan, May 22, 2004 (invited).

P269. "High fidelity grating replication using thermal nanoimprint lithography," C.-H. Chang, J.C. Montoya, M. Akilian, A. Lapsa, R.K. Heilmann and M.L. Schattenburg, 48th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, San Diego, California, June 1-4, 2004 (paper 6B5).

P270. "Thin foil reflection gratings for Constellation-X," R.K. Heilmann, M. Akilian, C.-H. Chang, C.R. Forest, C. Joo, A. Lapsa, J.C. Montoya and M.L. Schattenburg, presented at the SPIE Symposium on Astronomical Telescopes and Instrumentation 2004 -- Space Telescope Systems (UV-Gamma) (AS02), Glasgow, Scotland, June 21-25, 2004 (paper 5488-82).

P271. "The Constellation-X RGS options: raytrace modeling of the off-plane gratings," K.A. Flanagan, J.E. Davis, R.K. Heilmann, M. McGuirk, G.R. Ricker, M.L. Schattenburg, M. Wise, A. Rasmussen, J. Bookbinder, M. Freeman, T. Gaetz, D. Jerius, D. Nguyen, W. Podgorski, P. Reid, W. Cash, A. Shipley, D. Gallagher, P. Huang, and S. Jordan, presented at the SPIE Symposium on Astronomical Telescopes and Instrumentation 2004 -- UV-Gamma Ray Space Telescope Systems, Glasgow, Scotland, June 21-25, 2004 (paper 5488-31).

P272. "Nanometer precision metrology and constraint of thin optics for a high resolution x-ray telescope," M. Akilian, C.-H.Chang, C. Chen, C.R. Forest, R.K. Heilmann, C. Joo, P. Konkola, J. Montoya, Y. Sun and M.L. Schattenburg, Institute for Experimental Physics, Technische Universität Graz, Graz, Austria, July 15, 2004 (invited).

P273. "Large-area gratings for nanometer-accurate positioning and metrology," R.K. Heilmann and M.L. Schattenburg, Center for Functional Nanomaterials Seminar, Brookhaven National Laboratory, Upton, NY, July 21, 2004 (invited).

P274. "Space Nanotechnology Laboratory," M.L. Schattenburg, MIT Kavli Institute for Astrophysics and Space Research Advisory Committee Review, Cambridge, MA, Sept. 20, 2004.

P275. "The Nanoruler: A tool for rapid high-precision patterning of large-area gratings," R.K. Heilmann, C.G. Chen, P.T. Konkola and M.L. Schattenburg, poster presented at the R&D 100 Award Ceremony, Chicago, Illinois, Oct. 14, 2004 (invited).

P276. "Advances in x-ray reflection grating technology," M. Akilian, C.-H. Chang, R.K. Heilmann, J. Montoya and M.L. Schattenburg, Constellation-X Mission Facility Science Team Meeting, NASA Goddard Space Flight Center, Greenbelt, Maryland, Oct. 14-15, 2004.

P277. "Thin optics constraint," M. Akilian, C. Forest, A. Slocum, D. Trumper and M.L. Schattenburg, 19th Annual Meeting of the American Society of Precision Engineering, Orlando, Florida, Oct. 24-29, 2004 (Poster 2, Equipment, Machines & Instruments - Design & Testing).

P278. "Measuring two-axis stage mirror non-flatness using linear/angular interferometers," J. Montoya, R.K. Heilmann and M.L. Schattenburg, 19th Annual Meeting of the American Society of Precision Engineering, Orlando, Florida, Oct. 24-29, 2004 (Poster 5, Metrology - Analysis & Modeling).

P279. "Metrology for nanometer scale lithography," M.L. Schattenburg and R.K. Heilmann, Materials Research Society Symposium on Progress in Semiconductor Materials IV - Electronic and Optoelectronic Applications, Boston, MA, Nov. 30, 2004 (invited paper C3.4).

P280. "Nanoruler II progress report," M.L. Schattenburg, Laboratory for Laser Energetics, Rochester, New York, Jan. 13, 2005.

P281. "The MIT Nanoruler: A tool for patterning large high-accuracy gratings," M.L. Schattenburg, Lawrence Livermore National Laboratory, Livermore, California, Jan. 20, 2005 (invited).

P282. "How to build a spectroscopy x-ray telescope," R.K. Heilmann, MIT CSR IAP Lecture Series Frontiers of Astronomy, Astrophysics, and Space Science & Technology, Cambridge, Massachusetts, Jan. 20, 2005.

P283. "Toward improved linewidth control in scanning beam interference lithography," J. Montoya, R.K Heilmann and M.L Schattenburg, poster presented at the Microsystems Technology Laboratories Annual Research Conference, Waterville Valley Conference & Event Center, Waterville Valley, NH, Jan. 26-27, 2005.

P284. "Large-area lithography: where special relativity and nanotechnology meet," R.K. Heilmann, J.C. Montoya and M.L. Schattenburg, Joint New England Sections of APS and AAPT 2005 Spring Meeting at MIT, Cambridge, MA, April 1-2, 2005. (submitted March 4, 2005).

P285. "Linewidth control in Scanning Beam Interference Lithography," J. Montoya, C. Chang, R.K. Heilmann and M.L. Schattenburg, 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Orlando, Florida, May 31-June 3, 2005 (submitted February 4, 2005).

P286. "Shaping and assembly of thin grazing-incidence reflection gratings for soft-x-ray spectroscopy telescopes," R.K. Heilmann et al., SPIE conference on Optics for EUV, X-ray, and Gamma-ray Astronomy II, San Diego, CA, Aug. 3, 2005 (paper 5900-9).

P287. "TBD Fringe locking, Chang et al., 20th Annual Meeting of the American Society of Precision Engineering, Norfolk, Virginia, Oct. 9-14, 2005 (submitted).

P288. "Measurment of milli-degree temperature gradients in environmental enclosures," Y. Zhao, C.-H. Chang, J. Montoya, R. Heilmann and M.L. Schattenburg, 20th Annual Meeting of the American Society of Precision Engineering, Norfolk, Virginia, Oct. 9-14, 2005 (submitted).

P289. "TBD slumping," Akilian et al., 20th Annual Meeting of the American Society of Precision Engineering, Norfolk, Virginia, Oct. 9-14, 2005 (submitted).

P290. "Pattering ultra-precision gratings for dimensional metrology," M.L. Schattenburg, Symposium on Nanoscale Science & Engineering: Convergence of the Top Down and Bottom Up Approaches, University of North Carolina, Charlotte, Oct 24-25, 2005 (invited).

Theses (back to top)

Bachelor's Theses

TB6. Alan Heins, An Investigation of Crystal Fibers at Visible and Ultraviolet Wavelengths, Bachelor's Thesis, MIT Department of Physics, June 2002.

Masters Theses

TM6. Carl Gang Chen, Microcomb Fabrication for High Accuracy Foil X-ray Telescope Assembly and Vector Gaussian Beam Modeling, MIT Department of Electrical Engineering and Computer Science, June 2000.

TM7. Michael E. Walsh, Nanostructuring Magnetic Thin Films Using Interference Lithography, M.S.E.E.C.S. 2000.

TM8. Olivier Mongrard, High Accuracy Foil Optics for X-ray Astronomy, Master's Thesis, MIT Department of Aeronautical and Astronautical Engineering, September 2001.

TM9. Craig Forest, X-ray Telescope Foil Optics: Assembly, Metrology, and Constraint, Master's Thesis, Department of Mechanical Engineering, May 2003.

TM10. Chulmin Joo, Image Grating Metrology using a Fresnel Zone Plate, Master's Thesis, Department of Mechanical Engineering, September 2003.

TM11. Chih-Hao-Chang, Fabrication of Extremely Smooth Reflection Gratings, Master's Thesis, Department of Mechanical Engineering, June 2004.

PhD Dissertations

TD11. Dr. Juan Ferrera, Nanometer-Scale Placement in Electron-Beam Lithography, E.E.&C.S. 1999.

TD12. Dr. Thomas E. Murphy, Design, Fabrication and Measurement of Integrated Bragg Grating Optical Filters, Ph.D. Thesis, MIT Department of Electrical Engineering and Computer Science, February 2001.

TD13. Dr. Maya Farhoud, Fabrication and Characterization of Nanostructured Magnetic Particles for Applications in Data Storage, Ph.D. Thesis, MIT Department of Electrical Engineering and Computer Science, June 2001.

TD14. Dr. Paul Thomas Konkola, Design and Analysis of a Scanning Beam Interference Lithography System for Patterning Gratings with Nanometer-Level Distortion, Ph.D. Thesis, Department of Mechanical Engineering, April 2003.

TD15. Dr. Carl Gang Chen, Beam Alignment and Image Metrology for Scanning Beam Interference Lithography - Fabricating Gratings with Nanometer Phase Accuracy, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, April 2003.

TD19. Dr. Juan C. Montoya, Towards Nano-accuracy in Scanning Beam Interference Lithography, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June 2006.

Patents (back to top)

U1. "A lithography mask with a p-phase shifting attenuator," H.I. Smith, E.H. Anderson and M.L. Schattenburg, U.S. Patent No. 4,890,309 (December 26, 1989).

U2. "Energy beam locating," H.I. Smith, E.H. Anderson and M.L. Schattenburg, U.S. Patent No. 5,136,169 (August 4, 1992).

U3. "Holographic lithography," E.H. Anderson, H.I. Smith and M.L. Schattenburg, U.S. Patent No. 5,142,385 (August 25, 1992).

U4. "X-ray lithography masking," H.I. Smith, M.L. Schattenburg, J.M. Carter and M.H. Lim, U.S. Patent No. 5,809,103 (September 15, 1998).

U5. "A method and system for interference lithography utilizing phase-locked scanning beams," M.L. Schattenburg and P.N. Everett, U.S. Patent Ser. No. 09/711,019.

U6. "Spatial phase locking with shaped electron beam lithography," J.G. Hartley, T.R. Groves, J. Ferrera, J.G. Goodberlet, M.K. Mondol, M. L. Schattenburg and H.I. Smith, U. S. Patent No. 6,822,248 B2 (November 23, 2004).