Papers

PAPERS

Contents

Annual Reports
2004
2002
2001
2000
SNL Annual Report published by the Research Laboratory of Electronics (RLE)
SNL Annual Report published by the Microsystems Technology Laboratories (MTL)
SNL Annual Report published by the Microphotonics Center (MPC)

Publication Links
MIT Kavli Institute for Astrophysics and Space Research publications
NanoStructures Laboratory publications

2003-2008 Papers (back to top)

2003

R117. "Probing the cosmic X-ray laboratory with the Chandra HETGS," K.A. Flanagan, C.R. Canizares, D. Dewey, A. Fredericks, J.C. Houk, J.C. Lee, H.L. Marshall and M.L. Schattenburg, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 45-56 (2003).

R118. "Constellation-X Spectroscopy X-ray Telescope (SXT)," R. Petre, W.W. Zhang, D.A. Content, T. T. Saha, J. Stewart, J.H. Hair, D.Nguyen, W.A. Podgorski, W.R. Davis, Jr., M.D. Freeman, L.M. Cohen, M.L. Schattenburg, R.K. Heilmann, Y. Sun and C. Forest, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 433-440 (2003).

R119. "Constellation-X Spectroscopy X-ray Telescope assembly and alignment," W.A. Podgorski, D.A. Content, J.H. Hair, R. Petre, T.T. Saha, M.L. Schattenburg, J. Stewart and W.W. Zhang, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 491-502 (2003).

R120. "Precision shaping, assembly and metrology of foil optics for x-ray reflection gratings," C.R. Forest, M.L. Schattenburg, C.G. Chen, R.K. Heilmann, P. Konkola, J. Przbylowski, Y. Sun, J. You, S.M. Kahn and D. Golini, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Trumper and H.D. Tananbaum, 538-548 (2003).

R121. "Constellation-X soft x-ray telescope segmented optic assembly and alignment implementation," J.H. Hair, J. Stewart, R. Petre, W.W. Zhang, D.A. Content, T.T. Saha, W.A. Podgorski, P.E. Glenn, M.L. Schattenburg, R.K. Heilmann, Y. Sun and G. Nanan, Proc. SPIE 4851, X-ray and Gamma-ray Telescopes and Instruments for Astronomy (SPIE, Bellingham, WA), eds. J.E. Truemper and H.D. Tananbaum, 696-707 (2003).

R122. "Nanometer-accurate grating fabrication with scanning beam interference lithography," G.C. Chen, P.T. Konkola, R.K. Heilmann, C. Joo and M.L. Schattenburg, Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems (SPIE, Bellingham, WA) ed. D.K. Sood, 126-134 (2003).

R123. "Spatial phase locking with shaped beam lithography," J.G. Hartley, T.R. Groves, H.I. Smith, M.K. Mondol, J.G. Goodberlet, M.L. Schattenburg, J. Ferrera and A. Bernshteyn, Rev. Sci. Instrum. 74, 1377-1379 (2003). (CSR Reprint 01-86)

R124. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," C.-H. Chang, R.K. Heilmann, R.C. Fleming, J. Carter, E. Murphy, M.L. Schattenburg, T.C. Bailey, R.D. Frankel and R. Voisin, J. Vac. Sci. Technol. B 21. 2755-2759 (2003).

R125. "Precision microcomb design and fabrication for x-ray optics assembly," Y. Sun, R.K. Heilmann, C.G. Chen, C.R. Forest and M.L. Schattenburg, J. Vac. Sci. Technol. B 21, 2970-2974 (2003).

R126. "Nanometer-level repeatable metrology using the Nanoruler," P. Konkola, C. Chen, R.K. Heilmann, C. Joo, J. Montoya, C.-H. Chang and M.L. Schattenburg, J. Vac. Sci. Technol. B 21. 3097-3101 (2003).

R127. "Thin glass optic and silicon wafer deformation and kinematic constraint," C. Forest, M. Akilian, G. Vincent, A. Lamure and M.L. Schattenburg, Proc. of the 18th Annual Meeting of the American Society for Precision Engineering, 30 (ASPE, Raleigh, NC) 39-42 (2003).

2004

R128. "Metrology of thin transparent optics using Shack-Hartmann wavefront sensing," C.R. Forest, C.R. Canizares, D.R. Neal, M. McGuirk, A.H. Slocum and M.L. Schattenburg, J. Optical Engineering 43, 742-753 (2004).

R129. "Grating arrays for high-throughput soft x-ray spectrometers," A.P. Rasmussen, A. Aquila, J. Bookbinder, C. Chang, E. Gullikson, R.K. Heilmann, S.M. Kahn, F. Paerels and M.L. Schattenburg, Proc. SPIE 5168, Optics for EUV, X-ray, and Gamma-ray Astronomy (SPIE, Bellingham, WA), eds. O. Citterio and S.L. O'Dell, 248-259 (2004).

R130. "Advances in reflection grating technology for Constellation-X," R.K. Heilmann, M. Akilian, C.-H Chang, C.G. Chen, C. Forest, C. Joo, P. Konkola, J.C. Montoya, Y. Sun, J. You and M.L. Schattenburg, Proc. SPIE 5168, Optics for EUV, X-ray, and Gamma-ray Astronomy (SPIE, Bellingham, WA), eds. O. Citterio and S.L. O'Dell, 271-282 (2004).

R131. "Chandra high-resolution x-ray spectrum of supernova remnant 1E0102.2-7219," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, A.C. Fredericks, J.C. Houck, T.H. Markert and M. L. Schattenburg, Ap. J. 605, 230-246 (2004).

R132. "Dimensional metrology for nanometer-scale science and engineering: towards sub-nanometer accurate encoders," R. K. Heilmann, C. G. Chen, P. T. Konkola, and M. L. Schattenburg, Nanotechnology 15, S504-S511 (2004).

R133. " High fidelity grating replication using thermal nanoimprint lithography," C.-H. Chang, J. C. Montoya, M. Akilian, A. Lapsa, R. K. Heilmann, M. L. Schattenburg, M. Li, K. A. Flanangan, A. P. Rasmussen, J. F. Seely, J. M. Laming, B. Kjornrattanawanich, and L. I. Goray, J. Vac. Sci. Technol. B 22, 3260- 3264 (2004).

R134. " Thin-foil reflection gratings for Constellation-X," R. K. Heilmann, M. Akilian, C.-H. Chang, C. R. Forest, C. Joo, A. Lapsa, J. C. Montoya, and M. L. Schattenburg, Proc. SPIE 5488, UV-Gamma Ray Space Telescope Systems (SPIE, Bellingham, WA), eds. G. Hasinger and M. J. L. Turner, 283-290 (2004).

R135. " The Constellation-X RGS options: raytrace modeling of the off-plane gratings," K. A. Flanagan, J. E. Davies, R. K. Heilmann, M. McGuirk, G. R. Ricker, M. L. Schattenburg, M. Wise, A. Rasmussen, J. Bookbinder, M. Freeman, T. Gaetz, D. Jerius, D. Nguyen, W. Podgorski, P. Reid, W. Cash, A. Shipley, D. Gallagher, P. Huang, and S. Jordan, Proc. SPIE 5488, UV-Gamma Ray Space Telescope Systems (SPIE, Bellingham, WA), eds. G. Hasinger and M. J. L. Turner, 515-529 (2004).

R136. "Thin optics constraint," M. Akilian, C. Forest, A. Slocum, D. Trumper and M.L. Schattenburg, Proc. of the 19th Annual Meeting of the American Society for Precision Engineering, Vol. 34, 209-212 (2004).

R137. "Measuring two-axis stage mirror non-flatness using linear/angular interferometers," J. Montoya, R.K. Heilmann and M.L. Schattenburg, Proc. of the 19th Annual Meeting of the American Society for Precision Engineering, Vol. 34, 382-385 (2004).

2005

R138. "Chandra High Energy Transmission Grating: design, fabrication and ground calibration and five years in
flight," C.R. Canizares, J. Davis, D. Dewey, K.A. Flanagan, E. Galton, D.P. Huenemoerder, T.L. Markert, H.L. Marshall, M. McGuirk, M.L. Schattenburg, N.S. Schulz, H.I. Smith and M. Wise, Pub. Astronom. Soc. Pacific 117, 1144-1171 (2005).

R139. “Doppler writing and linewidth control for scanning beam interference lithography,” J. Montoya, C.-H.
Chang, R.K. Heilmann and M.L. Schattenburg, J. Vac. Sci. Technol. B 23, 2640-2645 (2005).

R140. “Measurement of milli-degree temperature gradients in environmental enclosures,” Y. Zhao, C.-H. Chang, J.
Montoya, R.K. Heilmann and M.L. Schattenburg, Proc. of the 20th Annual Meeting of the American Society for Precision Engineering, Vol. 37, 226-229 (2005).

R141. “Advanced heterodyne fringe-locking system using multiple frequency shifts,” C.-H. Chang, R.K Heilmann and M.L. Schattenburg, Proc. of the 20th Annual Meeting of the American Society for Precision Engineering, Vol. 37, 375-378 (2005).

R142. “Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing,” R.K. Heilmann, M. Akilian, C.-H. Chang, R. Hallock, E. Cleaveland and M.L. Schattenburg, Proc. SPIE 5900, Optics for EUV, X-ray, and Gamma-ray Astronomy II, eds. O. Citterio and S.L. O'Dell, 73-80 (2005).

R143. “Off-plane grazing-incidence Constellation-X grating calibrations using polarized synchrotron radiation and
PCGRATE code calculations,” J.F. Seely, L.I. Goray, B. Kjornrattanawanich, J.M. Laming, G.E. Holland, K.A. Flanagan, R.K. Heilmann, C.-H. Chang, M.L. Schattenburg and A.P. Rasmussen, Proc. SPIE 5900, Optics for EUV, X-ray, and Gamma-ray Astronomy II, eds. O. Citterio and S.L. O'Dell, 59-65 (2005).

2006

R144. “Describing isotropic and anisotropic out-of-plane deformations in thin cubic materials using Zernike polynomials,” C.-H. Chang, M. Akilian and M.L. Schattenburg, Applied Optics 45, 432-437 (2006).

R145. “Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating,” M.P. Kowalski, R.K. Heilmann, M.L. Schattenburg, C.-H. Chang, F.B. Berendse and W.R. Hunter, Applied Optics 45, 1676-1679 (2006).

R146. “Efficiency of a grazing-incidence off-plane grating in the soft x-ray region,” J.F. Seely, L.I. Goray, B. Kjornrattanawanich, J.M. Laming, G.E. Holland, K.A. Flanagan, R.K. Heilmann, C.-H. Chang, M.L. Schattenburg and A.P. Rasmussen, Applied Optics 45, 1680-1687 (2006).

R147. “Repeatable and accurate assembly of x-ray foil optics,” C.R. Forest, M. Spenko, Y. Sun, A.H. Slocum, R.K.
Heilmann and M.L. Schattenburg, J. Precision Engineering 30, 63-70 (2006).

R148. “Nanometrology for nanoscale science and engineering,” R. Hocken, J. Overcash, M.L. Schattenburg, D. Trumper, H.I. Smith and J. Joannopoulos, Proc. of 2006 NSF Design, Service, and Manufacturing Grantees and Research Conference, St. Louis, Missouri, paper 0506898, pp. 1-12 (2006).

R149. “The Constellation-X Reflection Grating Spectrometer,” J. Cottam, W. Cash, K.A. Flanagan, R.K. Heilmann,
G.Y. Prigozhin, A.P. Rasmussen, G.R. Ricker and M.L. Schattenburg, Proc. SPIE 6266, Space Telescopes and Instrumentation II: UV to Gamma Ray, eds. M.J.L. Turner and G. Hasinger, 62661X 1-8 (2006).

R150. “Assembly of thin gratings for soft x-ray telescopes,” M. Akilian, R.K. Heilmann and M.L. Schattenburg, Proc. SPIE 6266, Space Telescopes and Instrumentation II: UV to Gamma Ray, eds. M.J.L. Turner and G. Hasinger, pp. 62663O1-8 (2006).

R151. “Sub-millidegree stability air thermal control for a large-volume lithography enclosure,” Y. Zhao, D. Trumper R.K. Heilmann and M.L. Schattenburg, Proc. of the 21st Annual Meeting of the American Society for Precision Engineering, Vol. 39, 51-54 (2006).

R152. “Precision assembly of thin gratings for x-ray telescopes,” M. Akilian, R.K. Heilmann and M.L. Schattenburg, Proc. of the 21st Annual Meeting of the American Society for Precision Engineering, Vol. 39, 439-442 (2006).

P153. “Advanced interference lithography for nanomanufacturing,” M.L. Schattenburg, C.-H. Chang, R.K. Heilmann, J. Montoya, Y. Zhao, P. Glenn, D.J. Smith, D. Chargin and S. Ivanov, Proceedings of the International Symposium on Nanomanufacturing (ISNM 2006), MIT, Cambridge, MA, Nov. 1-3, 2006. (Paper #44).

2007

R154. “Thin optic constraint,” M. Akilian, C.R. Forest, D.L. Trumper, A.H. Slocum and M.L. Schattenburg, J. Precision Engineering 31, 130-138 (2007).

R155. “Phase control in multiexposure spatial frequency multiplication,” Y. Zhao, C.-H. Chang, R.K. Heilmann and
M.L. Schattenburg, J. Vac. Sci. Technol. B 25, 2439-2443 (2007).

R156. “Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers,” M. Ahn, R.K. Heilmann and M. L. Schattenburg, J. Vac. Sci. Technol. B 25, 2593-2597 (2007).

R157. “Spectrometer concept and design for x-ray astronomy using a blazed transmission grating,” K. Flanagan, M. Ahn, J. Davis, R. Heilmann, D. Huenemoerder, A. Levine, H. Marshall, G. Prigozhin, A. Rasmussen, G. Ricker, M. Schattenburg, N. Schulz and Y. Zhao, Proc. SPIE 6686, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, eds. S.L. O’Dell and G. Pareschi, pp. 66880Y-1-12 (2007).

2008

R158. “Design of a double-pass shear mode acousto-optical modulator,” C.-H. Chang, R.K. Heilmann, M.L. Schattenburg and P. Glenn, Rev. Sci. Instr. 79, pp. 033104-1-5 (2008).

R159. “Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors,” R.K.
Heilmann, M. Ahn, E.M. Gullikson, and M.L. Schattenburg, Optics Express 16, pp. 8658-8669 (2008).

R160. “Fabrication of 50 nm-period gratings with multilevel interference lithography,” C.-H. Chang, Y. Zhao, R.K.
Heilmann and M.L. Schattenburg, Opt. Lett. 33, 1572-1574 (2008).

R161. “Fabrication and performance of blazed transmission gratings for x-ray astronomy,” R.K. Heilmann, M. Ahn
and M.L. Schattenburg, Proc. SPIE 7011, eds. M.J.L. Turner and K.A. Flanagan, Conference on Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, pp. 701106-1-10 (2008).

R162. “Development of 91 cm size gratings and mirrors for LEFX laser system,” T. Jitsuno, S. Motokoshi, T. Okamoto, T. Mikami, D. Smith, M.L. Schattenburg, H. Kitamura, H. Matsuo, T. Kawasaki, K. Kondo, H. Shiraga, Y. Nakata, H. Habara, K. Tsubakimoto, R. Kodama, K.A. Tanaka, N. Miyanaga and K. Mima, J. Phys.: Conf. Ser. 112, 032002, pp. 1-4 (2008).

R163. “Nanomirror array for high-efficiency soft x-ray spectroscopy,” R.K. Heilmann, M. Ahn, and M.L. Schattenburg, SPIE Newsroom, DOI: 10.1117/2.1200808.1235, pp. 1-3 (2008).

R164. “Optimization and temperature mapping of an ultra-high thermal stability environmental enclosure,” Y. Zhao, D.L. Trumper, R.K. Heilmann and M.L. Schattenburg, J. Precision Engineering (submitted Aug. 2007).

R165. “Fabrication of 200 nm period blazed transmission gratings on silicon-on-insulator wafers,” M. Ahn, R.K. Heilmann and M.L. Schattenburg, 52nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Portland, Oregon, May 27-30, 2008 (JVST B, in press).

R166. “Spatial-frequency multiplication with multilayer interference lithography,” C.-H. Chang, Y. Zhao, R.K. Heilmann and M.L. Schattenburg, 52nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Portland, Oregon, May 27-30, 2008 (JVST B, in press).

R167. “Measuring stage mirror non-flatness in a two-axis linear/angular interferometry system,” Y. Zhao, J. Montoya, R.K. Heilmann and M.L. Schattenburg (JPE, in preparation).

2003-2008 Presentations (back to top)

2003

P237. "Spatially resolved plasma diagnostics with x-ray emission lines of 1E0102.2-7219," A.C. Fredericks, K.A. Flanagan, C.R. Canizares, D. Dewey, J.C. Houck and M.L. Schattenburg, 201st Meeting of the American Astronomical Society, Seattle, Washington, Jan. 5-9, 2003 (poster 87.06).

P238. "Environmental enclosure for the Nanoruler," M.L. Schattenburg, P. Konkola, C.-H Chang and C. Joo, Buildings for Advanced Technology Workshop, National Institute of Standards and Technology, Gaithersburg, Maryland, Jan. 14-16, 2003 (invited).

P239. "Nanoaccuracy: an essential element of nanotechnology," J.T. Hastings, M.L. Schattenburg, P. Konkola, E.E. Moon and H.I. Smith, Japan-US Symposium on Tools and Metrology for Nanotechnology, Cornell University, Ithaca, New York, Jan. 21-24, 2003 (invited).

P240. "Precision microcomb design and fabrication for x-ray optics assembly," Y. Sun, R.K. Heilmann, C.G. Chen, M.J. Spenko, C.R. Forest and M.L. Schattenburg, poster presented at the Microsystems Technology Laboratories Student Research Review, Dedham, Massachusetts, Jan. 28, 2003.

P241. "Reflection Grating Spectrometer grating array," M.L. Schattenburg, NASA Constellation X-ray Mission - Technology Readiness and Implementation Plan Site Visit Briefing, NASA Goddard Space Flight Center, Greenbelt, Maryland, Mar. 20, 2003.

P242. "Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortion," P.T. Konkola, Ph.D. Defense, MIT Department of Mechanical Engineering, Cambridge, Massachusetts, Apr. 3, 2003.

P243. "The importance of metrology in nanofabrication," M.L. Schattenburg, MIT Microsystems Technology Laboratories - Microlunch Seminar, Cambridge, Massachusetts, Apr. 8, 2003.

P244. "The role of nanometer-level accuracy and precision in nanomanufacturing," H.I. Smith and M.L. Schattenburg, First International Symposium on Nanomanufacturing, Cambridge, Massachusetts, Apr. 24-26, 2003 (invited).

P245. "Beam Alignment and Image Metrology for Scanning Beam Interference Lithography - Fabricating Gratings with Nanometer Phase Accuracy," C.G. Chen, Ph.D. Defense, MIT Department of Electrical Engineering and Computer Science, Cambridge, Massachusetts, Apr. 29, 2003.

P246. "X-ray microscopy with atomic resolution," I. McNulty, J. Miao and M.L. Schattenburg, MIT X-ray Laser Collaboration Workshop, MIT-Bates Linear Accelerator Center, Middleton, Massachusetts, May 2, 2003.

P247. "Nano-metrology using the Nanoruler," M.L. Schattenburg, P. Konkola, C. Chen, R.K. Heilmann, C. Joo, J. Montoya and C.-H. Chang, Defense Advanced Research Projects Agency (DARPA) - Advanced Lithography Program Review, Santa Fe, New Mexico, May 5-8, 2003.

P248. "Con-X reflection gratings: process development updates," R.K. Heilmann, C.-H. Chang, Y. Sun, C.G. Chen, C.R. Forest, P.T. Konkola, C. Joo, J. Montoya, M. Akilian, J. You, E. Murphy, R. Fleming, and M.L. Schattenburg, Constellation X Mission Facility Science Team Meeting, Columbia University, New York, New York, May 7-8, 2003.

P249. "Nanometer-level repeatable metrology using the Nanoruler," P. Konkola, C. Chen, R.K. Heilmann, C. Joo, J. Montoya, C.-H. Chang and M.L. Schattenburg, 47h International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, Florida, May 27-30, 2003 (paper 2B3)

P250. "Precision microcomb design and fabrication for x-ray optics," Y. Sun, R.K. Heilmann, C.G. Chen, M.J. Spenko, C.R. Forest and M.L. Schattenburg, 47h International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, Florida, May 27-30, 2003 (poster PJ12).

P251. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," C.-H. Chang, J. Carter, E. Murphy, M.L. Schattenburg, T.C. Bailey, R.D. Frankel and R. Voisin, 47h International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, Florida, May 27-30, 2003 (poster PC7).

P252. "Precision Microcomb Progress Report," R. K. Heilmann, Y. Sun, C. G. Chen, C. R. Forest, and M.L.
Schattenburg, Constellation-X SXT Technical Interchange Meeting, Goddard Space Flight Center, Greenbelt, Maryland, June 11, 2003.

P253. "Reengineering project of the thin foil optic holder," A. Lamure, Space Nanotechnology Laboratory Internship Presentation, MIT Kavli Institute for Astrophysics and Space Research, Cambridge, Massachusetts, June 13, 2003.

P254. "Grating arrays for high-throughput soft x-ray spectrometers," A.P. Rasmussen, J. Bookbinder, W. Cash, Jr., R.K. Heilmann, S.M. Kahn, F. Paerels and M.L. Schattenburg, SPIE Conference AM121: Optics for EUV, X-ray, and Gamma-ray Astronomy (O. Citterio and S.L. O'Dell), San Diego, California, Aug. 3-8, 2003 (paper 5168-28).

P255. "Advances in reflection grating technology for Constellation-X," R. K. Heilmann, M. Akilian, C. Chang, C.G. Chen, C. Forest, C. Joo, P. Konkola, J. Montoya, Y. Sun, J. You, and M. L. Schattenburg, SPIE Conference AM121: Optics for EUV, X-ray, and Gamma-ray Astronomy (O. Citterio and S.L. O'Dell), San Diego, California, Aug. 3-8, 2003 (paper 5168-30).

P256. "On improving the dynamic range of the CLAS-2D Shack-Hartmann system," A. Lapsa, Space Nanotechnology Laboratory Internship Presentation, MIT Kavli Institute for Astrophysics and Space Research, Cambridge, Massachusetts, Aug. 15, 2003.

P257. "The Space Nanotechnology Lab: from nanometers to gigaparsecs," R.K. Heilmann, M. Akilian, C.-H. Chang, R. Fleming, C. Joo, J. Montoya, E. Murphy, A. Torkaman and M.L. Schattenburg, MIT Astrophysics Internal Symposium, Cambridge, Massachusetts, Sept. 9-11, 2003.

P258. "Nanometrology in nanomanufacturing," M.L. Schattenburg, NASA Tech Briefs - Nanotech 2003 Conference, Cambridge, Massachusetts, Oct. 23-24, 2003 (invited).

P259. "Thin glass optic and silicon wafer deformation and kinematic constraint," C. Forest, M. Akilian, A. Lapsa, G. Vincent, A. Lamure and M.L. Schattenburg, 18th Annual Meeting of the American Society of Precision Engineering, Portland, Oregon, Oct. 26-31, 2003 (paper III-2).

P260. "Reflection grating development update," R.K. Heilmann, M. Akilian, C.-H. Chang, C.R. Forest, C. Joo, J.C. Montoya, A. Torkaman and M.L. Schattenburg, Constellation X Mission Facility Science Team Meeting, NASA Goddard Space Flight Center, Greenbelt, Maryland, Nov. 20, 2003.

P261. "The MIT Nanoruler: a tool for patterning large high-accuracy gratings," M.L. Schattenburg, University of Rochester, Laboratory for Laser Energetics, Workshop on Large Scale MLD Gratings for OMEGA EP, Rochester, NY, December 16, 2003 (invited).

2004

P262. "The Space Nanotechnology Lab: high resolution x-ray optics with nanometer precision," R.K. Heilmann, MIT IAP symposium Frontiers of Astronomy, Astrophysics, and Space Science, Cambridge, Massachusetts, Jan. 20, 2004.

P263. "The metrology crisis in nano manufacturing," M.L. Schattenburg, National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology, National Institute of Standards and Technology, Gaithersburg, Maryland, Jan. 27-29, 2004 (invited).

P264. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography,"C.-H. Chang, R.K. Heilmann and M.L. Schattenburg, poster presented at the Microsystems Technology Laboratories Student Research Review, Waterville Valley, New Hampshire, Jan. 28-29, 2004.

P265. "Dimensional metrology for nanoscale science and engineering," R.K. Heilmann and M.L. Schattenburg., IEEE Conference on Nanoscale Devices and System Integration, Miami, Florida, Feb. 15-19, 2004 (invited paper F2).

P266. "Fabrication of saw-tooth diffraction gratings using nanoimprint lithography," C.-H. Chang, J.C. Montoya, C. Joo, M. Akilian, A. Lapsa, R.K. Heilmann, M.L. Schattenburg, M. Li and A. Rasmussen, poster presented at the MIT Photonics & Roadmapping Spring Conference, Cambridge, Massachusetts, May 3-4, 2004.

P267. "Metrology for nanometer scale science and engineering," M.L. Schattenburg, R.K. Heilmann and H.I. Smith, presented at The 1st China-US Symposium on Nano Science and Technology, Beijing, China, May 17-20, 2004 (invited).

P268. "The MIT Nanoruler: A tool for patterning large high-accuracy gratings," M.L. Schattenburg, Institute for Laser Engineering, Osaka University, Osaka, Japan, May 22, 2004 (invited).

P269. "High fidelity grating replication using thermal nanoimprint lithography," C.-H. Chang, J.C. Montoya, M. Akilian, A. Lapsa, R.K. Heilmann and M.L. Schattenburg, 48th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, San Diego, California, June 1-4, 2004 (paper 6B5).

P270. "Thin foil reflection gratings for Constellation-X," R.K. Heilmann, M. Akilian, C.-H. Chang, C.R. Forest, C. Joo, A. Lapsa, J.C. Montoya and M.L. Schattenburg, presented at the SPIE Symposium on Astronomical Telescopes and Instrumentation 2004 -- Space Telescope Systems (UV-Gamma) (AS02), Glasgow, Scotland, June 21-25, 2004 (paper 5488-82).

P271. "The Constellation-X RGS options: raytrace modeling of the off-plane gratings," K.A. Flanagan, J.E. Davis, R.K. Heilmann, M. McGuirk, G.R. Ricker, M.L. Schattenburg, M. Wise, A. Rasmussen, J. Bookbinder, M. Freeman, T. Gaetz, D. Jerius, D. Nguyen, W. Podgorski, P. Reid, W. Cash, A. Shipley, D. Gallagher, P. Huang, and S. Jordan, presented at the SPIE Symposium on Astronomical Telescopes and Instrumentation 2004 -- UV-Gamma Ray Space Telescope Systems, Glasgow, Scotland, June 21-25, 2004 (paper 5488-31).

P272. "Nanometer precision metrology and constraint of thin optics for a high resolution x-ray telescope," M. Akilian, C.-H.Chang, C. Chen, C.R. Forest, R.K. Heilmann, C. Joo, P. Konkola, J. Montoya, Y. Sun and M.L. Schattenburg, Institute for Experimental Physics, Technische Universität Graz, Graz, Austria, July 15, 2004 (invited).

P273. "Large-area gratings for nanometer-accurate positioning and metrology," R.K. Heilmann and M.L. Schattenburg, Center for Functional Nanomaterials Seminar, Brookhaven National Laboratory, Upton, NY, July 21, 2004 (invited).

P274. "Space Nanotechnology Laboratory," M.L. Schattenburg, MIT Kavli Institute for Astrophysics and Space Research Advisory Committee Review, Cambridge, MA, Sept. 20, 2004.

P275. "The Nanoruler: A tool for rapid high-precision patterning of large-area gratings," R.K. Heilmann, C.G. Chen, P.T. Konkola and M.L. Schattenburg, poster presented at the R&D 100 Award Ceremony, Chicago, Illinois, Oct. 14, 2004 (invited).

P276. "Advances in x-ray reflection grating technology," M. Akilian, C.-H. Chang, R.K. Heilmann, J. Montoya and M.L. Schattenburg, Constellation-X Mission Facility Science Team Meeting, NASA Goddard Space Flight Center, Greenbelt, Maryland, Oct. 14-15, 2004.

P277. "Thin optics constraint," M. Akilian, C. Forest, A. Slocum, D. Trumper and M.L. Schattenburg, 19th Annual Meeting of the American Society of Precision Engineering, Orlando, Florida, Oct. 24-29, 2004 (Poster 2, Equipment, Machines & Instruments - Design & Testing).

P278. "Measuring two-axis stage mirror non-flatness using linear/angular interferometers," J. Montoya, R.K. Heilmann and M.L. Schattenburg, 19th Annual Meeting of the American Society of Precision Engineering, Orlando, Florida, Oct. 24-29, 2004 (Poster 5, Metrology - Analysis & Modeling).

P279. "Metrology for nanometer scale lithography," M.L. Schattenburg and R.K. Heilmann, Materials Research Society Symposium on Progress in Semiconductor Materials IV - Electronic and Optoelectronic Applications, Boston, MA, Nov. 30, 2004 (invited paper C3.4).

2005

P280. "Nanoruler II progress report," M.L. Schattenburg, Laboratory for Laser Energetics, Rochester, New York, Jan. 13, 2005.

P281. "The MIT Nanoruler: A tool for patterning large high-accuracy gratings," M.L. Schattenburg, Lawrence Livermore National Laboratory, Livermore, California, Jan. 20, 2005 (invited).

P282. "How to build a spectroscopy x-ray telescope," R.K. Heilmann, MIT CSR IAP Lecture Series Frontiers of Astronomy, Astrophysics, and Space Science & Technology, Cambridge, Massachusetts, Jan. 20, 2005.

P283. "Toward improved linewidth control in scanning beam interference lithography," J. Montoya, R.K Heilmann and M.L Schattenburg, poster presented at the Microsystems Technology Laboratories Annual Research Conference, Waterville Valley Conference & Event Center, Waterville Valley, NH, Jan. 26-27, 2005.

P284. "Large-area lithography: where special relativity and nanotechnology meet," R.K. Heilmann, J.C. Montoya and M.L. Schattenburg, Joint New England Sections of APS and AAPT 2005 Spring Meeting at MIT, Cambridge, MA, April 1-2, 2005. (submitted March 4, 2005).

P285. "Linewidth control in Scanning Beam Interference Lithography," J. Montoya, C. Chang, R.K. Heilmann and M.L. Schattenburg, 49th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Orlando, Florida, May 31-June 3, 2005 (submitted February 4, 2005).

P286. "Shaping and assembly of thin grazing-incidence reflection gratings for soft-x-ray spectroscopy telescopes," R.K. Heilmann et al., SPIE conference on Optics for EUV, X-ray, and Gamma-ray Astronomy II, San Diego, CA, Aug. 3, 2005 (paper 5900-9).

P287. “Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing,” R.K. Heilmann, M. Akilian, C.-H. Chang, R. Hallock, E. Cleaveland and M.L. Schattenburg, SPIE conference on Optics for EUV, X-ray, and Gamma-ray Astronomy II, San Diego, CA, Aug. 3-4, 2005 (paper 5900-09).

P288. “Off-plane grazing-incidence Constellation-X grating calibrations using polarized synchrotron radiation and
PCGRATE code calculations,” J.F. Seely, L.I. Goray, M. Laming, B. Kjornrattanawanich, K.A. Flanagan, R.K. Heilmann, A.P. Rasmussen, C. Chang and M.L. Schattenburg, SPIE conference on Optics for EUV, Xray, and Gamma-ray Astronomy II, San Diego, CA, Aug. 3-4, 2005 (paper 5900-11).

P289. “Precision gratings and optics for space research,” M.L. Schattenburg, Center for Applied Optics, University
of Alabama at Huntsville, Huntsville, AL, Aug. 5, 2005 (invited).

P290. “Using 2D scan SEM images for measuring grating line widths,” M. Zou, Space Nanotechnology Laboratory
Internship Presentation, MIT Kavli Institute for Astrophysics and Space Research, Cambridge, MA, Aug. 26, 2005.

P291. “Interferometric lithography – a nanotechnology enabler,” S.R.J. Brueck and M.L. Schattenburg, DARPANSF
Workshop on Nanopatterning for High-Complexity, High-Functionality Systems, Washington, D.C., Sept. 13, 2005 (invited).

P292. “Advanced interference lithography for writing nano-photonic patterns,” M.L. Schattenburg, C.-H. Chang,
R.K. Heilmann, J. Montoya and Y. Zhang, European Optical Society Topical meeting: Optical MicroSystem‘05, Capri Island, Napoli – Italy, Sept. 15-18, 2005 (invited).

P293. “Advanced heterodyne fringe-locking system using multiple frequency shifts,” C.-H. Chang, R.K Heilmann
and M.L. Schattenburg, 20th Annual Meeting of the American Society of Precision Engineering, Norfolk, Virginia, Oct. 9-14, 2005 (poster OI-1).

P294. “Measurment of milli-degree temperature gradients in environmental enclosures,” Y. Zhao, C.-H. Chang, J.
Montoya, R.K. Heilmann and M.L. Schattenburg, 20th Annual Meeting of the American Society of Precision Engineering, Norfolk, Virginia, Oct. 9-14, 2005 (poster DT-5).

P295. “Pattering ultra-precision gratings for dimensional metrology,” M.L. Schattenburg, Symposium on Nanoscale
Science & Engineering: Convergence of the Top-Down and Bottom-Up Approaches, University of North Carolina, Charlotte, NC, Oct 24-25, 2005 (invited).

P296. “Toward nano-accuracy in scanning beam interference lithography,” J. Montoya, Intel Corporation, Hillsboro, OR, Oct 28, 2005 (invited).

P297. “Reflection Grating Array (RGA) technology,” M.L. Schattenburg, R.K. Heilmann, K.A. Flanagan and P. Glenn, NASA Con-X Technology Assessment (RGA), MIT, Cambridge, MA, Dec. 2, 2005.

2006

P298. “Highlights of Constellation-X Reflection Grating Spectrometer technology development,” K. Flanagan, R.
Heilmann, G. Pregozhin, G. Ricker, M. Schattenburg, J. Cottam and A. Rasmussen, 207th Meeting of the American Astronomical Society, Washington, D.C., Jan. 8-12, 2006 (poster 12.01).

P299 “Efficiency of a grazing incidence off-plane grating in the soft x-ray region,” J.F. Seely, J.M. Laming, L.I. Goray, B. Kjornrattanawanich, G.E. Holland, K.A. Flanagan, R.K. Heilmann, C.-H. Chang, M.L. Schattenburg and A.P. Rasmussen, 207th Meeting of the American Astronomical Society, Washington, D.C., Jan. 8-12, 2006 (poster 12.02).

P300. “Soft x-ray reflection grating technology development for Constellation-X,” R.K. Heilmann, M. Akilian, C.-
H. Chang, J.C. Montoya, Y. Zhao and M.L. Schattenburg, 207th Meeting of the American Astronomical Society, Washington, D.C., Jan. 8-12, 2006 (poster 12.15).

P301. “Advanced interference lithography for patterning nano-optics,” M.L. Schattenburg, C.-H. Chang, R.K.
Heilmann, J. Montoya, Y. Zhao, P. Glenn, D.J. Smith, D. Chargin and S. Ivanov, SPIE Conference on MOEMS-MEMS Micro & Nanofabrication 2006, Micromachining Technology for Micro-Optics and Nano-Optics IV (MF06), San Diego, CA, Jan. 23-25, 2006 (invited paper 6110-1).

P302. “Progress on grating fabrication,” M.L. Schattenburg, C.-H. Chang, R.K. Heilmann, J. Montoya and Y. Zhao,
P. Glenn, D. J. Smith, D. Chargin and S. Ivanov, Constellation X-ray Mission Facility Science Team meeting, Cambridge, MA, Feb. 16, 2006.

P303. “Grating assembly,” M. Akilian, M. Ahn, C.-H. Chang, R. Fleming, R. Heilmann, Y.-O. Jung, J. Montoya, Y. Zhao and M.L. Schattenburg, Constellation X-ray Mission Facility Science Team meeting, Cambridge, MA, Feb. 16, 2006.

P304. “The Constellation-X Reflection Grating Spectrometer,” J. Cottam, W. Cash, K.A. Flanagan, R.K. Heilmann,
G.Y. Prigozhin, A.P. Rasmussen, G.R. Ricker and M.L. Schattenburg, International Workshop on High Resolution X-ray Spectroscopy: Towards Xeus and Con-X, Mullard Space Science Laboratory, Holmbury St. Mary, Dorking, Surrey, UK, Mar. 27-28, 2006 (poster 2-2).

P305. “The Constellation-X Reflection Grating Spectrometer,” J. Cottam, W. Cash, K.A. Flanagan, R.K. Heilmann,
G.Y. Prigozhin, A.P. Rasmussen, G.R. Ricker and M.L. Schattenburg, SPIE Conference AS02 on Space Telescopes and Instrumentation II: UV to Gamma Ray, Orlando, FL May 24-31, 2006 (poster 6266-70).

P306. “Assembly of thin gratings for soft x-ray telescopes,” M. Akilian, R.K. Heilmann and M.L. Schattenburg, SPIE Conference on Space Telescopes and Instrumentation II: UV to Gamma Ray, Orlando, FL, May 24-31, 2006 (poster 6266-135).

P307. “History of the EIPBN conference,” M.L. Schattenburg, special plenary presentation, 50th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Baltimore, MD, May 31, 2006 (invited plenary presentation).

P308. “Nanometrology for nanoscale science and engineering,” R. Hocken, M.L. Schattenburg, J. Overcash, D.
Trumper, H.I. Smith and J. Joannopoulos, 2006 NSF Design, Service, and Manufacturing Grantees and Research Conference, St. Louis, MO, July 24-27, 2006 (poster G17).

P309. “Needs and advances in metrology for precision motion control in mechatonics,” R.J. Hocken and M.L.
Schattenburg, International Measurement Confederation (IMEKO) XVIII World Congress -- Metrology for a Sustainable Development, Rio de Janeiro, Brazil, Sept. 17-22, 2006 (invited).

P310. “New techniques for fabricating gratings for pulse compression using scanning-beam interference lithography,” M.L. Schattenburg, C.-H. Chang, R.K. Heilmann, J. Montoya and Y. Zhao, D.J. Smith, M. Imus, P. Glenn, D. Chargin and S. Ivanov, International Conference on Ultrahigh Intensity Lasers, Cassis, France, Sept. 25-29, 2006 (paper 103).

P311. “Nanoruler II large grating lithography tool status,” M.L. Schattenburg, Heidenhain Corp., Traunreut, Germany, Sept. 29, 2006.

P312. “Sub-millidegree stability air thermal control for a large-volume lithography enclosure,” Y. Zhao, D. Trumper and M.L. Schattenburg, 21st Annual Meeting of the American Society of Precision Engineering, Monterey, CA, Oct. 15-20, 2006.

P313. “Precision assembly of thin gratings for x-ray telescopes,” M. Akilian, R.K. Heilmann and M.L. Schattenburg, poster presented at the 21st Annual Meeting of the American Society of Precision Engineering, Monterey, CA, Oct. 15-20, 2006.

P314. “Advanced interference lithography for nanomanufacturing,” M.L. Schattenburg, C.-H. Chang, R.K. Heilmann, J. Montoya, Y. Zhao, P. Glenn, D.J. Smith, D. Chargin and S. Ivanov, International Symposium on Nanomanufacturing (ISNM 2006), MIT, Cambridge, MA, Nov. 1-3, 2006 (paper TS3C-44).

P315. “Progress in scanning interference lithography,” M.L. Schattenburg, DARPA/MTO NanoFab Workshop, Midway, UT, Nov. 6-7, 2006 (invited).

P316. “Nanometrology for nanoscale science and engineering,” M.L Schattenburg, R. Heilmann, Y. Zhao, R. Hocken, J. Overcash, D.L. Trumper, poster presented at the 2006 Nanoscale Science and Technology Grantee Conference, National Science Foundation, Arlington, VA, Dec. 4-6, 2006.

P317. “Transmission Grating Spectrometer for Constellation-X,” K. Flanagan, M. Schattenburg, R. Heilmann and N. Schulz, NASA Constellation X Facility Science Team meeting, Greenbelt, MD, Dec. 18-20, 2006.

2007

P318. “Fabrication of ultra-high aspect ratio freestanding silicon gratings,” M. Ahn, R.K. Heilmann and M.L. Schattenburg, poster presented at the MIT Microsystems Technology Laboratories Annual Research Conference, Waterville Valley Conference & Event Center, Waterville Valley, NH, Jan. 24-25, 2007.

P319. “Research in the Space Nanotechnology Laboratory,” M.L. Schattenburg, R.K. Heilmann, M. Ahn, M. Akilian, C.-H. Chang and Y. Zhao, presented at the MIT Precision Engineering Center Technology Summit, MIT, Cambridge, MA, Feb. 19-20, 2007.

P320. “Thin substrate metrology, constraint and assembly,” M. Akilian and M.L. Schattenburg, poster presented at the MIT Precision Engineering Center Technology Summit, MIT, Cambridge, MA, Feb. 19-20, 2007.

P321. “Fabrication of large-area ultra-fine periodic nanostructures with spatial-frequency multiplication,” Chih-Hao
Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg, poster presented at the MIT Precision Engineering Center Technology Summit, MIT, Cambridge, MA, Feb. 19-20, 2007.

P322. “Sub-millidegree-stability air thermal control for a large-volume lithography enclosure,” Y. Zhao, D.L. Trumper, R.K. Heilmann and M.L. Schattenburg, poster presented at the MIT Precision Engineering Center Technology Summit, MIT, Cambridge, MA, Feb. 19-20, 2007.

P323. “Phase control in spatial frequency multiplication,” Y. Zhao, C.-H. Chang, R.K. Heilmann and M.L. Schattenburg, 51st International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Denver, CO, May 29-June 1, 2007 (paper 6C.4).

P324. “Fabrication of ultra-high aspect ratio freestanding gratings on silicon-on-insulator wafers,” M. Ahn, R.K.
Heilmann and M. L. Schattenburg, 51st International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Denver, CO, May 29-June 1, 2007 (paper 8C.2).

P325. “The critical angle transmission grating spectrometer” M.L. Schattenburg, presented at the Workshop in
Honor of Gordon Garmire's 70th birthday - 40 Years of X-ray Astronomy, Penn State University, State College, PA, June 14-15, 2007 (invited).

P326. “Blazed transmission gratings for soft x-ray spectroscopy,” R.K. Heilmann, M. Ahn, and M.L. Schattenburg,
X-ray Grating Spectroscopy Workshop, Chandra X-Ray Center, Cambridge, MA, July 11-13, 2007.

P327. “From Nanometers to Gigaparsecs: the Role of Nanotechnology in Unraveling the Mysteries of the Universe,” M.L. Schattenburg, LeadAmerica lecture, Franklin W. Olin College of Engineering, Needham, MA, July 16, 2007 (invited).

P328. “Fabrication and characterization of blazed transmission gratings for x-ray astronomy,” R.K. Heilmann, M.
Ahn, K.A. Flanagan and M.L. Schattenburg, SPIE Conference on Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, San Diego, CA, Aug. 29-30, 2007 (paper 6688-26).

P329. “Spectrometer concept and design using a blazed transmission grating for x-ray astronomy,” K. Flanagan, J.
Davis, R.K. Heilmann, D. Huenemoerder, G. Prigozhin, G. Ricker, M.L. Schattenburg, N. Schulz and A. Rasmussen, SPIE Conference on Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, San Diego, CA, Aug. 29-30, 2007 (paper 6688-27).

P330. “Development of 91 cm size gratings and mirrors for LEFX laser system,” T. Jitsuno, S. Motokoshi, T. Okamoto, T. Mikami, D. Smith, M.L. Schattenburg, H. Kitamura, H. Matsuo, T. Kawasaki, K. Kondo, H. Shiraga, Y. Nakata, H. Habara, K. Tsubakimoto, R. Kodama, K.A. Tanaka, N. Miyanaga and K. Mima, The Fifth International Conference on Inertial Fusion Sciences and Applications (IFSA 2007), Kobe, Japan, Sept. 9–14, 2007.

P331. “Precision motion and control for scanning beam interference lithography,” Andre Sharon, Fraunhofer Ctr.
for Manufacturing Innovation, Boston Univ., USA, Frontiers in Optics 2007/Laser Science XXIII, San Jose, CA, Sept. 16-20, 2007 (invited talk FTuE3).

2008

P332. “Nanometrology for nanoscale science and engineering,” M. Schattenburg, R. Heilmann, Y. Zhao, R. Hocken, J. Overcash, D. L. Trumper and D. Ljubicic, NSF CMMI Engineering Research and Innovation Conference, Knoxville, TN, Jan. 7-10, 2008.

P333. “Fabrication of ultra-high aspect ratio free-standing transmission gratings,” M. Ahn, R. Heilmann and M.L.
Schattenburg, Center for Nano & Molecular Science & Technology, University of Texas at Austin, Austin, TX, Jan 24, 2008 (invited).

P334. “Blazed transmission gratings for Constellation-X: EUV and soft x-ray results,” R.K. Heilmann, M. Ahn and
M.L. Schattenburg, Constellation-X Facility Science Team Meeting, Boulder, CO, Feb. 21-22, 2008.

P335. “Fabrication of 200 nm period blazed transmission gratings on silicon-on-insulator wafers,” M. Ahn, R.K.
Heilmann and M.L. Schattenburg, 52nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Portland, Oregon, May 27-30, 2008 (poster P-2B-1).

P336. “Spatial-frequency multiplication with multilayer interference lithography,” C.-H. Chang, Y. Zhao, R.K. Heilmann and M.L. Schattenburg, 52nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Portland, Oregon, May 27-30, 2008 (paper 9B-1, best student paper
award.)

P337. “Fabrication of 200 nm period blazed transmission gratings on silicon-on-insulator wafers,” M. Ahn, R.K. Heilmann and M.L. Schattenburg, Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA, June 2, 2007 (invited);

P338. “Spatial-frequency multiplication with multilayer interference lithography,” M.L. Schattenburg, C.-H. Chang,
Y. Zhao, and R.K. Heilmann, Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA, June 2, 2007 (invited).

P339. “A tutorial on critical-angle transmission (CAT) gratings,” R.K. Heilmann, NASA Goddard Space Flight Center, Greenbelt, MD, June 5, 2008 (invited).

P340. “Fabrication and performance of blazed transmission gratings for x-ray astronomy,” R.K. Heilmann, M. Ahn
and M.L. Schattenburg, SPIE Conference on Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, Palais des Congrès Parc Chanot, Marseille, France, June 23-28, 2008 (paper 7011-5).

P341. “Critical-angle transmission gratings for the International X-Ray Observatory,” R.K. Heilmann, M. Ahn and
M.L. Schattenburg, IXO Facility Science Team Meeting, NASA Goddard Space Flight Center, Greenbelt, MD, Aug. 20-22, 2008.

P342. “Spatial-frequency multiplication with multilevel interference lithography,” C.-H. Chang, Y. Zhao, R.K. Heilmann, and M.L. Schattenburg, 34th International Conference on Micro and Nano Engineering 2008, Athens, Greece, Sept. 15-18, 2008 (invited poster MLL-PO9).

P343. “Slumping of hot glass against porous air bearings,” M. Akilian, MIT Workshop on Lightweight Optics for Xray
Astronomy, Cambridge, MA, Sept. 25, 2008 (invited).

P344. “Assembly and metrology of thin optics,” M. Akilian, MIT Workshop on Lightweight Optics for X-ray Astronomy, Cambridge, MA, Sept. 25, 2008 (invited).

P345. “Large area pulse compression gratings fabricated onto fused silica substrates using scanning beam interference lithography, D.J. Smith et al., International Conference on Ultrahigh Intensity Lasers -- Development, Science and Emerging Applications, Shanghai-Tongli, China, Oct. 27-31, 2008.

Theses (back to top)

Bachelor's Theses

TB6. Alan Heins, An Investigation of Crystal Fibers at Visible and Ultraviolet Wavelengths, Bachelor's Thesis, MIT Department of Physics, June 2002.

Masters Theses

TM6. Carl Gang Chen, Microcomb Fabrication for High Accuracy Foil X-ray Telescope Assembly and Vector Gaussian Beam Modeling, MIT Department of Electrical Engineering and Computer Science, June 2000.

TM7. Michael E. Walsh, Nanostructuring Magnetic Thin Films Using Interference Lithography, M.S.E.E.C.S. 2000.

TM8. Olivier Mongrard, High Accuracy Foil Optics for X-ray Astronomy, Master's Thesis, MIT Department of Aeronautical and Astronautical Engineering, September 2001.

TM9. Craig Forest, X-ray Telescope Foil Optics: Assembly, Metrology, and Constraint, Master's Thesis, Department of Mechanical Engineering, May 2003.

TM10. Chulmin Joo, Image Grating Metrology using a Fresnel Zone Plate, Master's Thesis, Department of Mechanical Engineering, September 2003.

TM11. Chih-Hao-Chang, Fabrication of Extremely Smooth Reflection Gratings, Master's Thesis, Department of Mechanical Engineering, June 2004.

TM12. Mireille Akilian, Thin Optic Surface Analysis for High Resolution X-ray Telescopes , Master's Thesis, Department of Mechanical Engineering, September 2004.

PhD Dissertations

TD11. Dr. Juan Ferrera, Nanometer-Scale Placement in Electron-Beam Lithography, E.E.&C.S. 1999.

TD12. Dr. Thomas E. Murphy, Design, Fabrication and Measurement of Integrated Bragg Grating Optical Filters, Ph.D. Thesis, MIT Department of Electrical Engineering and Computer Science, February 2001.

TD13. Dr. Maya Farhoud, Fabrication and Characterization of Nanostructured Magnetic Particles for Applications in Data Storage, Ph.D. Thesis, MIT Department of Electrical Engineering and Computer Science, June 2001.

TD14. Dr. Paul Thomas Konkola, Design and Analysis of a Scanning Beam Interference Lithography System for Patterning Gratings with Nanometer-Level Distortion, Ph.D. Thesis, Department of Mechanical Engineering, April 2003.

TD15. Dr. Carl Gang Chen, Beam Alignment and Image Metrology for Scanning Beam Interference Lithography - Fabricating Gratings with Nanometer Phase Accuracy, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, April 2003.

TD19. Dr. Juan C. Montoya, Towards Nano-accuracy in Scanning Beam Interference Lithography, Ph.D. Thesis, Department of Electrical Engineering and Computer Science, June 2006.

TD20. Dr. Yong Zhao, Ultra-high Precision Scanning Beam Interference Lithography and its Application - Spatial Frequency Multiplication, Ph.D. Thesis, Department of Mechanical Engineering, May 2008.

TD21. Dr. Mireille Akilian, Methods of Improving the Surface Flatness of Thin Glass Sheets and Silicon Wafers , Ph.D. Thesis, Department of Mechanical Engineering, September 2008.

TD22. Dr. Chih-Hao Chang, Multilevel Interference Lithography-Fabricating Sub-wavelength Periodic Nanostructures , Ph.D. Thesis, Department of Mechanical Engineering, September 2008.

Patents (back to top)

U1. "A lithography mask with a p-phase shifting attenuator," H.I. Smith, E.H. Anderson and M.L. Schattenburg, U.S. Patent No. 4,890,309 (December 26, 1989).

U2. "Energy beam locating," H.I. Smith, E.H. Anderson and M.L. Schattenburg, U.S. Patent No. 5,136,169 (August 4, 1992).

U3. "Holographic lithography," E.H. Anderson, H.I. Smith and M.L. Schattenburg, U.S. Patent No. 5,142,385 (August 25, 1992).

U4. "X-ray lithography masking," H.I. Smith, M.L. Schattenburg, J.M. Carter and M.H. Lim, U.S. Patent No. 5,809,103 (September 15, 1998).

U5. "A method and system for interference lithography utilizing phase-locked scanning beams," M.L. Schattenburg and P.N. Everett, U.S. Patent Ser. No. 09/711,019.

U6. "Spatial phase locking with shaped electron beam lithography," J.G. Hartley, T.R. Groves, J. Ferrera, J.G. Goodberlet, M.K. Mondol, M. L. Schattenburg and H.I. Smith, U. S. Patent No. 6,822,248 B2 (November 23, 2004).

Talks (back to top)

MIT Workshop on Lightweight Optics for X-ray Astronomy

P0. Agenda

P1. "Approaches for building large high-resolution x-ray telescopes ," Steve O'Dell, MIT, Cambridge, MA, September 25, 2008.

P2. "International X-ray Observatory ," Jay Bookbinder, MIT, Cambridge, MA, September 25, 2008.

P3. "Slumping of Hot Glass against Porous Air Bearings ," Mireille Akilian, MIT, Cambridge, MA, September 25, 2008.

P4. "Assembly and Metrology of Thin Optics ," Mireille Akilian, MIT, Cambridge, MA, September 25, 2008.

P5. "Development of Advanced Grazing Incidence Optics at SAO ," Paul B. Reid, MIT, Cambridge, MA, September 25, 2008.

P6. "The Generation-X Mission Study ," Roger Brissenden, MIT, Cambridge, MA, September 25, 2008.

P7. "Fabrication of Mirror Segments for the IXO Mission ," Will Zhang, MIT, Cambridge, MA, September 25, 2008.