Papers

PAPER ARCHIVES

Contents

Annual Reports
Papers
Presentations
Theses

Annual Reports
2002
2001
2000

R84. "Medium Energy Neutral Atom (MENA) imager for the IMAGE mission," C. J. Pollock, M. Balkey, J. Burch, J. Cravens, G. Dirks, H. Funsten, M. Grande, M. Gruntman, J.-M. Jahn, M. Lampton, D. J. McComas, T. Mukai, S. Pope, S. Ritzau, E. Scime, M. L. Schattenburg, R. Skoug, P. Valek, S. Weidner, and M. Wuest, Space Science Reviews 91, 113-154 (2000).

R85. "Initial Results from the Chandra High Energy Transmission Grating Spectrometer," C. Canizares, D. S. Davis, D. Dewey, K. Flanagan, J. Houck, D. Huenemoerder, H. Marshall, M. L. Schattenburg, N. Schulz, and M. Wise, in Atomic Data Needs for X-ray Astronomy, eds. M. A. Bautista, T. R. Kallman, and A. K. Pradhan (NASA, Washington D.C.), 5-9 (2000).

R86. "High resolution x-ray spectra of Capella: Initial results from the Chandra High Energy Transmission Grating Spectrometer," C. R. Canizares, D. P. Huenemoerder, D. S. Davis, D. Dewey, K. A. Flanagan, J. Houck, T. H. Markert, H. L. Marshall, M. L. Schattenburg, N. S. Schulz, M. Wise, J. J. Drake, and N. S. Brickhouse, Astrophysical Journal Letters 539, L41-L44 (2000).

R87. "Development of segmented x-ray mirrors for Constellation-X," R. Petre, C. Chen, L.M. Cohen, D.A. Content, R.J. Harms, G. Monnelly, T.T. Saha, M.L. Schattenburg, P.J. Serlemitsos and W.W. Zhang, in Proc. SPIE 4012, X-Ray Optics, Instruments and Missions III, eds. J.E. Truemper and B. Aschenbach, 370-378 (2000). (CSR reprint 00-115)

R88. "Microcomb design and fabrication for high accuracy optical assembly," C. G. Chen, R. K. Heilmann, P. T. Konkola, O. Mongrard, G. P. Monnelly, and M. L. Schattenburg, to be published in J. Vac. Sci. Technol. B 18, 3272-3276 (Nov/Dec 2000).

R89. "Relativistic corrections in displacement measuring interferometry," R. K. Heilmann, P. T. Konkola, C. G. Chen, and M. L. Schattenburg, J. Vac. Sci. Technol. B 18, 3277-3281 (Nov/Dec 2000).

R90. "Beam steering system and spatial filtering applied to interference lithography," P. Konkola, C. G. Chen, R. Heilmann, and M. L. Schattenburg, J. Vac. Sci. Technol. B 18, 3282-3286 (Nov/Dec 2000).

R91. "Progress toward meeting the Constellation-X performance goals using segmented x-ray mirrors," R. Petre, L. M. Cohen, D. A. Content, J. Hein, T. T. Saha, M. L. Schattenburg, and W. W. Zhang, to appear in Proc. SPIE 4138 X-Ray Optics, Instruments, and Missions IV, eds. R. B. Hoover and A. B. C. Walker.

R92. "Precision assembly station for high-resolution segmented optics," H. Bergner, L. M. Cohen, M. L. Schattenburg, and G. Monnelly, to appear in Proc. SPIE 4138, X-Ray Optics, Instruments, and Missions IV, eds. R. B. Hoover and A. B. C. Walker.

R93. "High-accuracy x-ray foil optic assembly," Glen P. Monnelly, Olivier Mongrard, David Breslau, Nat Butler, C. G. Chen, L. Cohen, W. Gu, R. K. Heilmann, P. T. Konkola, G. R. Ricker, and M. L. Schattenburg, to appear in Proc. SPIE 4138, X-Ray Optics, Instruments, and Missions IV, eds. R. B. Hoover and A. B. C. Walker.

R94. "Modeling the Chandra High Energy Transmission Gratings below 2 keV," K. A. Flanagan, T. H. Markert, J. E. Davis, M. L. Schattenburg, R. L. Blake, F. Scholze, P. Bulicke, R. Fliegauf, S. Kraft, G. Ulm, and E. M. Gullikson, Proc. SPIE 4140, X-Ray and Gamma-Ray Instrumentation for Astronomy XI, eds. K.A. Flanagan and O.H.W. Siegmund (SPIE, Bellingham, WA) 559-572 (2001). (CSR reprint 00-52).

R95. "First Medium Energy Neutral Atom (MENA) images of Earth's magnetosphere during substorm and storm-time," C.J. Pollock, K. Asamura, M.M. Balkey, J.L. Burch, H.O. Funsten, M. Grande, M. Gruntman, J.-M. Jahn, M. Lampton, M.W. Liemohn, D.J. McComas, T. Mukai, S. Ritzau, M.L. Schattenburg, E. Scime, R. Skoug, P. Valek and M. Wüest, Geophysical Research Letters 8, 1147-1150 (2001). (CSR reprint 00-91).

R96. "Ionization and velocity structure in the supernova remnant E0102-72," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, in X-ray Astronomy 2000 (ASP Conference Proceedings, Vol. 234), eds. R. Giacconi, S. Serio and L. Stella (Astronomical Society of the Pacific, San Francisco, CA). (in press) (CSR Reprint 01-11)

R97. "High resolution spectroscopy of two oxygen-rich SNRs with the Chandra HETG," C.R. Canizares, K.A. Flanagan, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, in Young Supernova Remnants: Eleventh Astrophysics Conference, College Park, Maryland, October 2000 (AIP Conference Proceedings, Vol. 565), eds. S.S. Holt and U. Hwang (American Institute of Physics, Melville, NY), 213-221 (2001). (CSR Reprint 01-26)

R98. "Ionization structure and the reverse shock in E0102-72," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, in Young Supernova Remnants: Eleventh Astrophysics Conference, College Park, Maryland, October 2000 (AIP Conference Proceedings, Vol. 565), eds. S.S. Holt and U. Hwang (American Institute of Physics, Melville, NY), 226-229 (2001). (CSR Reprint 01-24)

R99. "Spectral line imaging observations of 1E0102.2-7219," D.S. Davis, K.A. Flanagan, J.C. Houck, G.E. Allen, N.S. Schulz, D. Dewey, M.L. Schattenburg and C.R. Canizares, in Young Supernova Remnants: Eleventh Astrophysics Conference, College Park, Maryland, October 2000 (AIP Conference Proceedings, Vol. 565), eds. S.S. Holt and U. Hwang (American Institute of Physics, Melville, NY), 230-233 (2001). (CSR Reprint 01-25)

R100. "Image metrology and system controls for scanning beam interference lithography," C.G. Chen, P.T. Konkola, R.K. Heilmann, G.S. Pati and M.L. Schattenburg, J. Vacuum Sci. Technol. B 19, 2335-2341 (2001). (CSR Reprint 01-64)

R101. "Digital heterodyne interference fringe control system," R.K. Heilmann, C.G. Chen, P.T. Konkola, G.S. Pati and M.L. Schattenburg, J. Vacuum Sci. Technol. B 19, 2342-2346 (2001). (CSR Reprint 01-53)

R102. "From nanometers to gigaparsecs: the role of nanostructures in unraveling the mysteries of the cosmos," M.L. Schattenburg, J. Vacuum Sci. Technol. B 19, 2319-2328 (2001). (CSR Reprint 01-85)

R103. "Scanning beam interference lithography," P.T. Konkola, C.G. Chen, R.K. Heilmann, G. Pati and M.L. Schattenburg, Proceedings of the Sixteenth Annual Meeting of the American Society for Precision Engineering (American Society for Precision Engineering, Raleigh, NC), 15-18 (2001). (CSR Reprint 01-102)

R104. "High precision assembly and metrology of x-ray foil optics," O. Mongrard, N. Butler, C.G. Chen, R.K. Heilmann, P.T. Konkola, M. McGuirk, G. Monnelly, G.S. Pati, G.R. Ricker, M.L. Schattenburg and L. Cohen, Proceedings of the Sixteenth Annual Meeting of the American Society for Precision Engineering (American Society for Precision Engineering, Raleigh, NC), 40-43 (2001). (CSR Reprint 01-103)

R105. "A novel sub-microradian beam diagnostic and alignment system," C.G. Chen, R.K. Heilmann, P.T. Konkola, G.S. Pati and M.L. Schattenburg, Proceedings of the Sixteenth Annual Meeting of the American Society for Precision Engineering (American Society for Precision Engineering, Raleigh, NC), 216-219 (2001). (CSR Reprint 01-104)

R106. "Field emitter arrays for low voltage applications with sub 100 nm apertures and 200 nm period," D.G. Pflug, M.L. Schattenburg, H.I. Smith and A.I. Akinwande, Technical Digest, 2001 IEEE International Electron Device Meeting (submitted). (CSR Reprint 01-87)

R107. "The critical role of metrology in nanotechnology," M.L. Schattenburg and H.I. Smith, Proceedings of the SPIE Workshop on Nanostructure Science, Metrology and Technology, Gaithersburg, Maryland, 5-7 September, 2001 (Proc. SPIE, Vol. 4608) (in press invited paper). (CSR Reprint 01-105)

R108. "Progress towards a general grating patterning technology using phase-locked scanning beams" M.L. Schattenburg, C.G. Chen, R.K. Heilmann, P.T. Konkola and G.S. Pati, Proc. SPIE 4485, Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research IV, eds. A.M. Larar and M.G. Mlynczak, 378-384 (2002). (CSR Reprint 01-83)

R109. "Novel methods for shaping thin-foil optics for x-ray astronomy," R.K. Heilmann, G.P. Monnelly, O. Mongrard, N. Butler, C.G. Chen, L.M. Cohen, C.C. Cook, L.M. Goldman, P.T. Konkola, M. McGuirk, G.R. Ricker and M.L. Schattenburg, Proc. SPIE 4496, X-ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers and Missions, eds. P. Gorenstein and R.B. Hoover, 62-72 (2002). (CSR Reprint 01-82)

R110. "Analysis of vector Gaussian beam propagation and the validity of paraxial and spherical approximations," C.G. Chen, P.T. Konkola, J. Ferrera, R.K. Heilmann and M.L. Schattenburg, J. Optical Society of America A 19, 404-412 (2002). (CSR reprint 00-48).

R111. "Beam alignment and wavefront metrology for scanning beam interference lithography," C.G. Chen, R.K. Heilmann, C. Joo, P.T. Konkola, G.S. Pati and M.L. Schattenburg, J. Vac. Sci. Technol. B 20, 3071-3074 (2002). (CSR Reprint 02-34)

R112. "Precision fringe metrology using a Fresnel zone plate," C. Joo, G.S. Pati, C.G. Chen, P.T. Konkola, R.K. Heilmann, M.L. Schattenburg, A. Liddle and E.H. Anderson, J. Vac. Sci. Technol. B 20, 3075-3079 (2002). (CSR Reprint 02-35)

R113. "A generalized scanning beam interference lithography system for patterning gratings with variable period progressions," G.S. Pati, R.K. Heilmann, P.T. Konkola, C. Joo, C.G. Chen, E. Murphy and M.L. Schattenburg, J. Vac. Sci. Technol. B 20, 2617-2621 (2002). (CSR Reprint 02-35)

R114. "Effects of varying incident angle on the contrast of the fringe metrology using a fresnel zone plate," C. Joo, G.S. Pati, C.G. Chen, P.T. Konkola, R.K. Heilmann and M.L. Schattenburg, Proc. of the Seventeenth Annual Meeting of the American Society for Precision Engineering, 27 (ASPE, Raleigh, NC), 83-88 (2002).

R115. "Precision assembly and metrology of x-ray foil optics," C.R. Forest, M.J. Spenko, Y. Sun, M. McGuirk, M.L. Schattenburg and A.H. Slocum, Proc. of the Seventeenth Annual Meeting of the American Society for Precision Engineering, 27 (ASPE, Raleigh, NC), 244-249 (2002).

R116. "Precision of microcomb design and fabrication for Constellation-X soft x-ray telescope segmented optic assembly," Y. Sun, C.G. Chen, R.K. Heilmann, C. Forest, M. Spenko, P.T. Konkola, M. McGuirk, C. Joo and M.L.Schattenburg, Proc. of the Seventeenth Annual Meeting of the American Society for Precision Engineering 27 (ASPE, Raleigh, NC), 244-249 (2002).

Presentations (back to top)

P145. "Nanometrology," M.L. Schattenburg, presented at the Nanogathering, Cambridge, Massachusetts, Jan. 6, 2000.

P146. "Microcomb design and fabrication for high accuracy optical assembly," C. Chen, O. Mongrard, L. Cohen, R.K. Heilmann, P. Konkola, G. Monnelly and M.L. Schattenburg, poster presented at the Microsystems Technology Laboratories Student Research Review, Dedham, Massachusetts, Jan. 10, 2000.

P147. "Spectral line imaging observations of E0102-72," D.S. Davis, K.A. Flanagan, J.C. Houck, G.E. Allen, N.S. Schulz, D. Dewey, M.L. Schattenburg and C.R. Canizares, presented at the American Astronomical Society 195th Meeting: SN 1987A and Other Supernova Remnants, Atlanta, Georgia, Jan. 13, 2000 (paper 43.06).

P148. "Chandra HETG observations of the supernova remnant E0102-72," J.C. Houck, K.A. Flanagan, D.S. Davis, G.E. Allen, N. Schulz, D. Dewey, M.L. Schattenburg and C.R. Canizares, presented at the American Astronomical Society 195th Meeting: Chandra, Atlanta, Georgia, Jan. 15, 2000 (paper 112.09).

P149. "Space Nanotechnology Laboratory," M.L. Schattenburg, private briefing to Lt. Gen. Spence (Sam) M. Armstrong, NASA Associate Administrator, Cambridge, Massachusetts, Mar. 22, 2000.

P150. "Development of segmented x-ray mirrors for Constellation-X," R. Petre, C. Chen, L.M. Cohen, D.A. Content, R.J. Harms, G. Monnelly, T.T. Saha, M.L. Schattenburg, P.J. Serlemitsos and W.W. Zhang, poster presented at SPIE Astronomical Telescopes and Instrumentation 2000 -- X-Ray Optics, Instruments and Missions III, Munich, Germany, Mar. 27-31 2000 (paper 4012-36).

P151. "Beam steering system and spatial filtering applied to interference lithography," P. Konkola, C.G. Chen, R.K. Heilmann and M.L. Schattenburg, poster presented at the 44th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication, Palm Springs, California, May 30-June 2, 2000 (paper P7-1).

P152. "Microcomb design and fabrication for high accuracy optical assembly," C. Chen, L. Cohen. R.K. Heilmann, P. Konkola, O. Mongrard, G. Monnelly and M.L. Schattenburg, presented at the 44th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication, Palm Springs, California, May 30-June 2, 2000 (paper 16-4).

P153. "Relativistic corrections in displacement measuring interferometry," R.K. Heilmann, P. Konkola, C. Chen and M.L. Schattenburg, presented at the 44th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication, Palm Springs, California, May 30-June 2, 2000 (paper 16-5).

P154. "First Medium Energy Neutral Atom Imager results from the IMAGE Mission," C.J Pollock, K. Asamura, M.M. Balkey, J.L. Burch, M.-C. Fok, H.O. Funsten, M. Grande, M. Gruntman, J.-M. Jahn, M. Lampton, D.J. McComas, T. Mukai, S. Ritzau, M.L. Schattenburg, E. Scime, R. Skoug, P. Valek and M. Wuest, presented at the 2000 American Geophysical Union Spring Meeting, Washington, D.C., May 30 - June 3, 2000 (invited paper SM51B-16).

P155. "High resolution spectroscopy of the supernova remnant E0102-72," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, presented at the American Astronomical Society 196th Meeting: A New Era in X-ray Astronomy, Rochester, New York, June 7, 2000 (paper 34.09).

P156. "First Medium Energy Neutral Atom Imager results from the IMAGE mission," J.-M. Jahn, K. Asamura, M.M. Balkey, J.L. Burch, M.-C. Fok, H.O. Funsten, M. Grande, M. Gruntman, M. Lampton, D.J. McComas, T. Mukai, C.J. Pollock, S. Ritzau, M.L. Schattenburg, E. Scime, R. Skoug and P. Valek, poster presented at the NSF: Geospace Environment Modeling (GEM 2000) - Snowmass Summer Workshop, Snowmass Village, Colorado, June 19-23, 2000.

P157. "Early ENA results from the IMAGE Mission," C.J. Pollock, K. Asamura, M.M. Balkey, J.L. Burch, M.-C. Fok, H.O. Funsten, M. Grande, M. Gruntman, J.-M. Jahn, M. Lampton, D.J. McComas, T. Mukai, S. Ritzau, M.L. Schattenburg, E. Scime, R. Skoug, P. Valek and M. Wuest, poster presented at the NATO Advanced Study Institute on Space Storms and Space Weather Hazards, Hersonissos (Crete), Greece, June 19-29, 2000.

P158. "Magnetospheric ENAs observed with the IMAGE/MENA imager," J.-M. Jahn, C. Pollock, J. Burch, D. McComas, M. Gruntman, E. Scime, T. Mukai, H. Funsten, M. Grande, M. Lampton, S. Ritzau, M.L. Schattenburg, R. Skoug, P. Valek and M. Wuest, presented at the 33rd COSPAR Scientific Assembly: Advances in Global Magnetospheric Structure, Dynamics and Region Coupling, Warsaw, Poland, July 16-23, 2000 (paper D3.3-0047).

P159. "High-accuracy x-ray foil optic assembly," G.P. Monnelly, D. Breslau, N. Butler, C.C. Chen, L. Cohen, W. Gu, R.K. Heilmann, P.T. Konkola, O. Mongrard, G.R. Ricker and M.L. Schattenburg, presented at the SPIE Conference on X-Ray Optics, Instruments, and Missions, San Diego, California, July 30-31, 2000 (paper 4138-23).

P160. "Precision assembly station for high-resolution segmented optics," L.M. Cohen, H. Bergner, M.L. Schattenburg and G. Monnelly, presented at the SPIE Conference on X-Ray Optics, Instruments, and Missions, San Diego, California, July 30-31, 2000 (paper 4138-20).

P161. "Progress toward meeting the Constellation-X performance goals using segmented x-ray mirrors," R. Petre, L.M. Cohen, D.A. Content, J. Hein, T.T. Saha, M.L. Schattenburg and W. W. Zhang, presented at the SPIE Conference on X-Ray Optics, Instruments, and Missions, San Diego, California, July 30-31, 2000 (paper 4138-06).

P162. "Modeling the Chandra High Energy Transmission Gratings below 2 keV," K.A. Flanagan, T.H. Markert, J.E. Davis, M.L. Schattenburg, R.L. Blake, F. Scholze, P. Bulicke, R. Fliegauf, S. Kraft, G. Ulm and E.M. Gullikson, presented at the SPIE Conference on X-Ray and Gamma-Ray Instrumentation for Astronomy XI, San Diego, California, Aug. 2-4, 2000 (paper 4140-67).

P163. "Ionization and Velocity Structure in the Supernova Remnant E0102-72," K. A. Flanagan, C. R. Canizares, D. S. Davis, D. Dewey, J. C. Houck, and M. L. Schattenburg, presented at X-Ray Astronomy 2000, Mondello (Palermo), Italy, Sept. 4-9, 2000 (poster 4.2).

P164. "Spectral line imaging observations of 1E0102.2-7219," D.S. Davis, K.A. Flanagan, J.C. Houck, G.E. Allen, N.S. Schulz, D. Dewey, M.L. Schattenburg and C.R. Canizares, poster presented at the Eleventh Annual Oct. Astrophysics Conference in Maryland -- Young Supernova Remnants, College Park, Maryland, Oct. 16-18, 2000.

P165. "Ionization structure and the reverse shock in E0102-72," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, poster presented at the Eleventh Annual Oct. Astrophysics Conference in Maryland -- Young Supernova Remnants, College Park, Maryland, Oct. 16-18, 2000.

P166. "High resolution spectroscopy of two oxygen-rich SNRs with the Chandra HETG," C.R. Canizares, K.A. Flanagan, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, presented at the Eleventh Annual Oct. Astrophysics Conference in Maryland -- Young Supernova Remnants, College Park, Maryland, Oct. 16-18, 2000.

P167. "The shocking story of E0102-72," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, J.C. Houck and M.L. Schattenburg, Harvard-Smithsonian Center for Astrophysics -- High Energy Astrophysics Division Lunch Talk, Cambridge, Massachusetts, Oct. 25, 2000 (invited).

P168. "Spectral Line Imaging Observations of E0102-72," D. S. Davis, K. A. Flanagan, J. C. Houck, G. A. Allen, N. S. Schulz, D. Dewey, M. L. Schattenburg, and C. R. Canizares, presented at the American Astronomical Society - High Energy Astrophysics Division Meeting, Honolulu, Hawaii, November 9, 2000 (paper 32.05).

P169. "High Resolution Spectroscopy of Supernova Remnants with Chandra," K. A. Flanagan, C. R. Canizares, D. S. Davis, J. C. Houck, G. E. Allen, D. Dewey, M. L. Schattenburg, and N. S. Schulz, presented at the American Astronomical Society - High Energy Astrophysics Division Meeting, Honolulu, Hawaii, November 10, 2000 (paper 40.01).

P170. "Interference lithography for space optics, nanometrology and integrated optics," M. L. Schattenburg, MIT EECS/RLE Seminar Series on Optics and Quantum Electronics, Cambridge, Massachusetts, November 29, 2000 (invited).

P171. "Alignment and control architecture for scanning beam interference lithography" C. Chen, P. Konkola, R. Heilmann and M.L. Schattenburg, poster presented at the MIT Microsystems Technology Laboratories Student Research Review, Dedham, Massachusetts, January 9, 2001.

P172. "Advanced interference lithography and applications," M.L. Schattenburg, University of Central Florida, School of Optics/CREOL Seminar, Orlando, Florida, February 15, 2001 (invited).

P173. "From nanometers to gigaparsecs: the role of nanostructures in unraveling the mysteries of the cosmos," M.L. Schattenburg, MIT Nanostructures Seminar, Cambridge, Massachusetts, March 14, 2001 (invited).

P174. "Metrology for the sub-100 domain via fiducial grids," M.L. Schattenburg, C. Chen, R. Heilmann, P. Konkola and H.I. Smith, National Institute of Standards and Technology -- Manufacturing Engineering Laboratory Seminar, Gaithersburg, Maryland, March 30, 2001 (invited).

P175. "Metrology for the sub-100 nm domain via fiducial grids," M.L. Schattenburg, C. Chen, R. Heilmann, P. Konkola and H.I. Smith, Defense Advanced Research Projects Administration - Advanced Lithography Program Review, Charleston, South Carolina, April 2-5, 2001 (invited).

P176. "X-ray reflection grating update," M.L. Schattenburg, Constellation X-ray Mission Facility Science Team Meeting, Cambridge, Massachusetts, May 4, 2001.

P177. "From nanometers to gigaparsecs: the role of nanostructures in unraveling the mysteries of the cosmos," M.L. Schattenburg, 45th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington, D.C., May 30, 2001 (invited plenary talk 1-1).

P178. "Spatial phase locking with shaped beam lithography," J.G. Hartley, T.R. Groves, H.I. Smith, M.K. Mondol, J.G. Goodberlet, M.L. Schattenburg, J. Ferrera and A. Bernshteyn, 45th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington, D.C., May 29-June 1, 2001 (paper P2-2).

P179. "Image metrology and system controls for scanning beam interference lithography," C.G. Chen, P.T. Konkola, R.K. Heilmann, G.S. Pati and M.L. Schattenburg, 45th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington, D.C., May 29-June 1, 2001 (invited paper P7-1).

P180. "Digital heterodyne interference fringe locking system," R.K. Heilmann, C.G. Chen, P.T. Konkola, G.S. Pati and M.L. Schattenburg, 45th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Washington, D.C., May 29-June 1, 2001 (paper 4-5).

P181. "Novel methods for shaping thin-foil optics for x-ray astronomy," R.K. Heilmann, G.P. Monnelly, O. Mongrard, N. Butler, C.G. Chen, L.M. Cohen, C.C. Cook, L.M. Goldman, P.T. Konkola, M. McGuirk, G.R. Ricker and M.L. Schattenburg, presented at the SPIE Conference on X-ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers and Missions, San Diego, California, July 30, 2001 (paper 4496-06).

P182. "Segmented x-ray mirror for the Constellation-X Spectroscopy X-ray Telescope," R. Petre, L.M. Cohen, D.A. Content, T.T. Saha, M.L. Schattenburg, J. Stewart and W.W. Zhang, SPIE Conference on X-ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers and Missions, San Diego, California, July 30, 2001 (paper 4496-10).

P183. "Wavefront sensors for x-ray and EUV optics fabrication," M. McGuirk, G.P. Monnelly, M.L. Schattenburg and C.R. Canizares, SPIE Conference on X-ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers and Missions, San Diego, California, July 30, 2001 (paper 4496-12).

P184. "Progress towards a general grating patterning technology using phase-locked scanning beams," M.L. Schattenburg, C.G. Chen, R.K. Heilmann, P.T. Konkola and G.S. Pati, SPIE Conference on Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research IV, San Diego, California, August 2, 2001 (paper 4485-61).

P185. "Alignment Combs -Status Review and Outlook", R. K. Heilmann, G. P. Monnelly, D. Breslau, N. Butler, C. G. Chen, L. M. Cohen, W. Gu, P. T. Konkola, O. Mongrard, G. R. Ricker Jr., and M. L. Schattenburg, Constellation-X SXT Optics Team Meeting, GSFC, August 7-8, 2001

P186. "Pattern placement metrology in the nanometer domain," M.L. Schattenburg, Seminar of the Laboratory of Photonics and Nanostructures, National Center for Scientific Research, Bagneux, France, August 9, 2001 (invited).

P187. "Pattern placement metrology in the nanometer domain," M.L. Schattenburg and H.I. Smith, talk and poster presented at the SPIE/NIST/ONR Workshop on Nanostructure Science, Metrology and Technology, Gaithersburg, Maryland, September 5-7, 2001 (invited).

P188. "X-ray emission line measurements of SNR 1E0102.2-7219," A.C. Fredericks, K.A. Flanagan, D.S. Davis, C.R. Canizares, D. Dewey, J.C. Houck and M.L. Schattenburg, presented at the 12th Maryland Annual Astrophysics Conference - Two Years of Science with Chandra, Washington, D.C., September 5-7, 2001 (paper 185).

P189. "The Chandra high resolution x-ray spectrum of N103B," K.A. Flanagan, C.R. Canizares, D.S. Davis, D. Dewey, A.C. Fredericks, J.C. Houck, T.G. Pannuti and M.L. Schattenburg, presented at the 12th Maryland Annual Astrophysics Conference - Two Years of Science with Chandra, Washington, D.C., September 5-7, 2001 (paper 227).

P190. "MIT precision machine design: x-ray optics alignment project," C.R. Forest, Dover Instrument Corporation, Westborough, Massachusetts, October 12, 2001 (invited).

P191. "Microcomb/Alignment Bar Design Update", R. K. Heilmann, C. G. Chen, O. Mongrard, M. L. Schattenburg, and Y. Sun, Constellation-X SXT Engineering Unit Technical Interchange Meeting, GSFC, Nov. 6, 2001

P192. "Scanning beam interference lithography," P.T. Konkola, C.G. Chen, R.K. Heilmann, G. Pati and M.L. Schattenburg, presented at the Sixteenth Annual Meeting of the American Society for Precision Engineering, Arlington, Virginia, November 10-15, 2001 (invited paper I-1).

P193. "High precision assembly and metrology of x-ray foil optics," M.L. Schattenburg, O. Mongrard, N. Butler, C.G. Chen, R.K. Heilmann, P.T. Konkola, M. McGuirk, G. Monnelly, G.S. Pati, G.R. Ricker and L. Cohen, presented at the Sixteenth Annual Meeting of the American Society for Precision Engineering, Arlington, Virginia, November 10-15, 2001 (paper II-4).

P194. "A novel sub-microradian beam diagnostic and alignment system," C.G. Chen, R.K. Heilmann, P.T. Konkola, G.S. Pati and M.L. Schattenburg, poster presented at the Sixteenth Annual Meeting of the American Society for Precision Engineering, Arlington, Virginia, November 10-15, 2001.

P195. "Silicon microcombs for precision x-ray foil assembly," Y. Sun, O. Mongrard, C. Chen, R. Heilmann, C. Forest, J. You, M. Spenko and M.L. Schattenburg, presented at the NASA Constellation X Mission Facility Science Team Meeting, Greenbelt, Maryland, November 15-16, 2001.

P196. "X-ray reflection grating update," Y. Sun, O. Mongrard, C. Chen, R. Heilmann, C. Forest, J. You, M. Spenko and M.L. Schattenburg, presented at the NASA Constellation X Mission Facility Science Team Meeting, Greenbelt, Maryland, November 15-16, 2001.

P197. "Proposed off-plane reflection grating fabrication process," M.L. Schattenburg and G.R. Ricker, presented at the NASA Constellation X Mission Facility Science Team Meeting, Greenbelt, Maryland, November 15-16, 2001.

P198. "The importance of nanotechnology and nanometrology for space instrumentation," M.L. Schattenburg, Space Nano-technology Workshop, Tsukuba Space Center, National Space Development Agency of Japan, Tsukuba, Japan, November 27, 2001 (invited).

P199. "Advanced technology for future x-ray astronomy missions," M.L. Schattenburg, Institute for Space and Astronautical Science, Sagamihara, Japan, November 28, 2001 (invited).

P200. "Space nanotechnology," M.L. Schattenburg, private briefing to the Council for Science and Technology Policy, Japanese Cabinet Office, Tokyo, Japan, November 29, 2001.

P201. "Field emitter arrays for low voltage applications with sub 100 nm apertures and 200 nm period," D.G. Pflug, M.L. Schattenburg, H.I. Smith and A.I. Akinwande, presented at the IEEE International Electron Devices Meeting, Washington, D.C., December 3-5, 2001 (paper 8.5).

P202. "Nanometrology", M.L. Schattenburg, US/Germany Joint Meeting on Nanoscale Science and Engineering at MIT, Cambridge, Massachusetts, December 5-6, 2001.

P203. "MIT 2.75 Precision Machine Design Project: x-ray optics assembly truss," C. Forest, Y. Sun, M. Spenko, M.L. Schattenburg and A. Slocum, MIT Precision Machine Design Class (2.75) Final Presentation, Cambridge, Massachusetts, December 12, 2001.

P204. "Plasma diagnostics with x-ray emission lines of 1E0102.2-7219," A.C. Fredericks, K.A. Flanagan, C.R. Canizares, D. Dewey, J.C. Houck and M.L. Schattenburg, poster presented at the 199th Meeting of the American Astronomical Society, Washington, D.C., January 6-10, 2002 (paper 126.18).

P205. "MIT Space Nanotechnology Lab X-Ray Optics Assembly Truss," C. Forest, Y. Sun, M. Spenko, M.L. Schattenburg, A. Slocum, Constellation-X SXT Engineering Unit Technical Interchange Meeting, Goddard Space Flight Center, Janurary 23, 2002.

P206. "Nanometrology research at MIT," M.L. Schattenburg and H.I. Smith, University of Central Florida, School of Optics/CREOL Seminar, Orlando, Florida, February 19, 2002 (invited).

P207. "Nanometrology research at MIT," M.L. Schattenburg and H.I. Smith, International SEMATECH -- Metrology Council Meeting, Austin, Texas, February 26, 2002 (invited).

P208. "The critical role of metrology in nanotechnology," M.L. Schattenburg, MIT Mechanical Engineering Department Seminar, Cambridge, Massachusetts, March 1, 2002 (invited).

P209. "Grating-based nanometer metrology," M.L. Schattenburg, C. Chen, C. Joo, R.K. Heilmann, P. Konkola, G.S. Pati and H.I. Smith, Defense Advanced Research Projects Administration - Advanced Lithography Program Review, New Orleans, Louisiana, April 9-11, 2002.

P210. "Reflection Grating Spectrometer (RGS) progress report," M.L. Schattenburg and R.K. Heilmann, Constellation X Mission Facility Science Team Meeting, Greenbelt, Maryland, May 1, 2002.

P211. "Technology for a large-area reflection grating spectrometer on Constellation-X," S.M. Kahn, F. Paerels, A. Rasmussen, M.L. Schattenburg, G.R. Ricker, M.W. Bautz, J.P. Doty, G.Y. Prigozhin, J. Nousek, D. Burrows, J.E. Hill and W. Cash, Constellation X Mission Facility Science Team Meeting, Greenbelt, Maryland, May 1, 2002.-

P212. "Beam alignment and wavefront metrology for scanning beam interference lithography," C.G. Chen, R.K. Heilmann, C. Joo, P.T. Konkola, G.S. Pati and M.L. Schattenburg, abstract submitted to the 46th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Anaheim, California, May 28-31, 2002 (paper 10B4).

P213. "Nanometer-accurate fringe metrology using a Fresnel zone plate," C. Joo, G.S. Pati, P.T. Konkola, C.G. Chen, R.K. Heilmann, E.H. Anderson and M.L. Schattenburg, abstract submitted to the 46th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Anaheim, California, May 28-31, 2002 (paper 10B5).

P214. "A generalized scanning beam interference lithography system for patterning gratings with variable period progressions," G.S. Pati, P.T. Konkola, C.G. Chen, C. Joo, R.K. Heilmann and M.L. Schattenburg, abstract submitted to the 46th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Anaheim, California, May 28-31, 2002 (poster PG7).

P215. "Nanoaccuracy in nanolithography," H.I. Smith and M.L. Schattenburg, presented at the US-Korea Nanofabrication Workshop, Hanyang University, Seoul, Korea, June 3-5 (2002).

P216. "Thin foil optic," V. Guillaume, Internship Presentation, MIT Center for Space Research, Cambridge, Massachusetts, June 19, 2002.

P217. "Grating production methods," M.L. Schattenburg and R.K. Heilmann, Constellation X-ray Mission Reflection Grating/CCD Team Technical Working Meeting, Cambridge, Massachusetts, July 3, 2002.

P218. "Shack-Hartmann surface metrology system," C.R. Forest, Precitech Corporation, Keene, New Hampshire, July 27, 2002 (invited).

P219. "Shack-Hartmann surface metrology system," C.R. Forest, Zygo Corporation, Milford, Connecticut, July 28, 2002 (invited).

P220. "Probing the cosmic X-ray laboratory with the Chandra HETGS," K.A. Flanagan, C.R. Canizares, D. Dewey, A. Fredericks, J.C. Houk, J.C. Lee, H.L. Marshall and M.L. Schattenburg, SPIE Conference on X-ray and Gamma-ray Telescopes and Instruments for Astronomy, Waikoloa, Hawaii, August 25-28, 2002 (paper 4851-04).

P221. "Constellation-X spectroscopy x-ray telescope (SXT)," R. Petre, W.W. Zhang, D.A. Content, T. T. Saha, J. Stewart, J.H. Hair, D.Nguyen, W.A. Podgorski, W.R. Davis, Jr., M.D. Freeman, L.M. Cohen, M.L. Schattenburg, R.K. Heilmann, Y. Sun and C. Forest, SPIE Conference on X-ray and Gamma-ray Telescopes and Instruments for Astronomy, Waikoloa, Hawaii, August 25-28, 2002 (paper 4851-50).

P222. "Constellation-X soft x-ray telescope assembly and alignment," W.A. Podgorski, D.A. Content, J.H. Hair, R. Petre, T.T. Saha, M.L. Schattenburg, J. Stewart and W.W. Zhang, SPIE Conference on X-ray and Gamma-ray Telescopes and Instruments for Astronomy, Waikoloa, Hawaii, August 25-28, 2002 (paper 4851-57).

P223. "Precision shaping, assembly and metrology of foil optics for x-ray reflection gratings," C.R. Forest, M.L. Schattenburg, C.G. Chen, R.K. Heilmann, P. Konkola, J. Przbylowski, Y. Sun, J. You, S.M. Kahn and D. Golini, SPIE Conference on X-ray and Gamma-ray Telescopes and Instruments for Astronomy, Waikoloa, Hawaii, August 25-28, 2002 (paper 4851-62).

P224. "Constellation-X soft x-ray telescope segmented optic assembly and alignment implementation," J.H. Hair, J. Stewart, R. Petre, W.W. Zhang, D.A. Content, T.T. Saha, W.A. Podgorski, P.E. Glenn, M.L. Schattenburg, R.K. Heilmann, Y. Sun and G. Nanan, SPIE Conference on X-ray and Gamma-ray Telescopes and Instruments for Astronomy, Waikoloa, Hawaii, August 25-28, 2002 (poster 4851-76).

P225. "Nanotech research at MIT," C.G. Chen, Victoria State Department of Regional Development, Melbourne, Australia, Aug. 26, 2002 (invited).

P226. "The Space Nanotechnology Laboratory," M.L. Schattenburg, poster presented at the Summer School on: Nano and Giga Challenges in Microelectronics Research and Opportunities in Russia, Department of Physics, M.V. Lomonosov Moscow State University, Moscow, Russia, September 10-11, 2002 (invited).

P227. "Fabrication of ultra-high accuracy diffraction gratings for nanometrology and spectroscopy applications." P. N. Lebedev Physical Institute of the Russian Academy of Sciences (FIAN), Moscow, Russia, September 11, 2002 (invited).

P228. "The critical role of metrology in nanotechnology," M.L. Schattenburg, presented at the Symposium on: Nano and Giga Challenges in Microelectronics Research and Opportunities in Russia, Palace of Science of the Russian Academy of Sciences, Moscow, Russia, September 12-13, 2002 (invited).

P229. "X-ray reflection gratings: shaping, metrology, assembly," C.R. Forest, M.J. Spenko, Y. Sun, A.H. Slocum, R.K. Heilmann, M.L. Schattenburg and D. Golini, Constellation X Mission Facility Science Team Meeting, Cambridge, Massachusetts, September 19, 2002.

P230. "Microcomb fabrication update," Y. Sun, R. Heilmann, C. Chen, C. Forest and M.L. Schattenburg, Constellation X Mission Facility Science Team Meeting, Cambridge, Massachusetts, September 19, 2002.

P231. "Interference fringe locking using Fresnel zone plates," C. Joo, G.S. Pati, C.G. Chen, P.T. Konkola, R.K. Heilmann and M.L. Schattenburg, presented at the 17th Annual Meeting of the American Society of Precision Engineering, St. Louis, Missouri, October 20-25, 2002 (paper V-4).

P232. "Precision assembly and metrology of x-ray foil optics," C.R. Forest, M.J. Spenko, Y. Sun, M. McGuirk, M.L. Schattenburg, and A.H. Slocum, presented at the 17th Annual Meeting of the American Society of Precision Engineering, St. Louis, Missouri, October 20-25, 2002. (poster Mems and Nanotech #2).

P233. "Precision microcomb design and fabrication for Constellation-X soft x-ray telescope segmented optic assembly," Y. Sun, C.G. Chen, R.K. Heilmann, C. Forest, M. Spenko, P.T. Konkola, M. McGuirk, C. Joo and M.L.Schattenburg, presented at the 17th Annual Meeting of the American Society of Precision Engineering, St. Louis, Missouri, October 20-25, 2002 (poster Mems and Nanotech #7).

P234. "Scanning beam interference lithography," P. Konkola, presented at Brion Technologies, Inc., Mountain View, California, Nov. 1, 2002 (invited).

P235. "Evaporated electron beam sensitive organic resist for the back-patterning of x-ray lithography masks," E. Lavalée, J. Beauvais, D. Drouin, M. Cloutier, L.K. Mun, Y. Awad, H.I. Smith, M.H. Lim, J. Carter and M.L. Schattenburg, presented at the 2002 International Microprocesses and Nanotechnology Conference, Tokyo Fashion Town, Japan, Nov. 6-8, 2002 (paper 8A-11-5).

P236. "Nanometer-accurate grating fabrication with scanning beam interference lithography," G.C. Chen, P.T. Konkola, R.K. Heilmann, C. Joo and M.L. Schattenburg, Conference on Nano- and Microtechnology: Materials, Processes, Packaging, and Systems -- part of SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems, Melbourne, Australia, December 16-18, 2002 (paper 4936-28).