Scanning electron micrograph of the hierarchical structure of a large-area CAT grating membrane fabricated from a silicon-on-insulator wafer.

Shaping of thin-foil x-ray optics

X-ray optics for space-based applications need to be wafer-thin AND maintain accurate figure.

Home of the MIT Nanoruler

The Nanoruler is the first tool to implement the patented patterning technique called Scanning Beam Interference Lithography (SBIL). (© Volker Steger, Science Photo Library)

The Chandra X-Ray Observatory

The SNL fabricated hundreds of transmission gratings for the High Energy Transmission Grating Spectrometer on board of Chandra, launched in 1999, and still operating. (Image credit: NASA/CXC/SAO)

Advanced X-Ray and EUV Diffraction Gratings

The innovative Critical-Angle Transmission (CAT) grating combines the best of transmission and reflection gratings in the soft x-ray band...

Shaping of Thin-Foil X-Ray Optics

We are pioneering alternative methods for the shaping and figure correction of thin-foil optics utilized as grazing-incidence mirrors in space-based x-ray telescopes...

Scanning Beam Interference Lithography: The Nanoruler

The Nanoruler is a prize-winning tool for the rapid high-precision patterning of large-area gratings...
Congratulations to Dong Guan on his MS in Mechanical Engineering and to the Nationalmannschaft on its World Cup win!
The 29th Annual Meeting of the American Society for Precision Engineering takes place in Boston on Nov. 9-14, 2014.