CRITICAL-ANGLE TRANSMISSION (CAT) GRATINGScanning electron micrograph of the hierarchical structure of a large-area CAT grating membrane fabricated from a silicon-on-insulator wafer.
Shaping of thin-foil x-ray opticsX-ray optics for space-based applications need to be wafer-thin AND maintain accurate figure.
Home of the MIT Nanoruler
The Nanoruler is the first tool to implement the patented patterning technique called Scanning Beam Interference Lithography (SBIL). (© Volker Steger, Science Photo Library
The Chandra X-Ray ObservatoryThe SNL fabricated hundreds of transmission gratings for the High Energy Transmission Grating Spectrometer on board of Chandra, launched in 1999, and still operating. (Image credit: NASA/CXC/SAO)
Shaping of Thin-Foil X-Ray Optics
We are pioneering alternative methods for the shaping and figure correction of thin-foil optics utilized as grazing-incidence mirrors in space-based x-ray telescopes...
The 58th International Conference on Electron, Ion, and Photon Beam Lithography and Nanofabrication (EIPBN) is taking place on May 27-30, 2014, in Washington, DC.